Transcript mSR Customer Presentation

mSR Series
miniature Square Rail Linear Positioner
Do you have applications in any of
these industries?
Electronics
Life
Science
Semiconductor
Manufacturing
(Microscopy)
Miniature Positioning Trends
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Small form factors
Higher dynamic response
Higher resolution
Higher repeatability
Higher accuracy
Rapid instrument development and
deployment
Would you also like…
• Robust linear motion
• A modular solution that can easily be
adapted to XYZ systems
• Tailored precision performance
• A dependable, proven supplier of linear
motion products
• Short product leadtimes
Introducing the next generation of
miniature precision positioning!
The NEW mSR!
mSR Series Positioner
mSR 100
mSR 80
• 2 form factors
• mSR 80
• mSR 100
• 6 different
encoder options
25 mm
• Ironcore
• Ironless
35 mm
• 2 different linear
motors
80 mm
100 mm
mSR 80
• Next generation solution for MX80-L
applications
• Allows for higher precision performance (4 X
better repeatability)
• Fits similar volumetric foot print
• Uses the same ironcore linear motor as its
drive
• Designed with latest encoder technology
on board
mSR 80 Design Features
4.
2.
Optional magnetic
counterbalance
Center driven direct
drive motor
Produces high thrust in
small packaging, yielding
excellent dynamic
response
Allows for Z-axis
orientation without
the need for air
3.
1.
Integrated high
precision square rails
Provide guidance, allows
for superior straightness
/flatness, and stiffness
5.
Convenient mounting
holes and dowel pinning
The same mounting
as MX80-L for ease
of migration
Integrated linear
encoder, home and
limits
Five encoder options
for flexible precision
performance, with
adjustable onboard
limits and home
sensing
mSR 80 Stroke Performance
Stroke (mm)
25
35
50
100
150
Max. Load (kg)
4
4
8
8
8
Continuous
Thrust (N)
4
4
8
8
8
12
12
24
24
24
2000
2000
2000
Peak Thrust (N)
Maximum Speed
(mm/sec)
1100 1500
Maximum
Acceleration (G’s)
3
Bi-Directional
Repeatability (µ)1
0.1
Straightness and
Flatness (µ)1
1Precision
3
3
4
grade, with 0.01 micron optical encoder
5
10
mSR 80 Performance
mSR 80
Ironcore motor
• 2 miniature Ironcore motor options
• CS Option- 4 pole producing 4 N cont., 12 N peak
• CD Option - 8 pole producing 8 N cont., 24 N peak
mSR 80 Encoder Options
Magnetic
Read Head
Optical
Read Head
• Magnetic incremental with 1 micron
resolution
• Highly economical feedback option
• Optical incremental resolutions of 1.0, 0.1,
and 0.01 micron
• Sine/Cosine output
• Resolution determined by drive interpolation
Magnetic Counter Balance
• The mSR 80 – 25 mm
stroke only
• Standard options for
magnetic counterbalance
• Must be sized per load
• Improved design over
pneumatic as it requires
no energy.
• Ideal for focusing
applications
mSR 80 Versus MX80L
• Similar in total volume at a given stroke
MX80L 25 mm stroke
Fully extended
mSR 80 25 mm stroke
Fully retracted
mSR 80 Versus MX80L
Length
(mm)
Travel* (mm)
Motor Pole
MX80L
Length
mSR080L-025CS
128
25
4
114.5
mSR080L-035CS
138
35
4
-
mSR080L-050CD
183
50
8
147
mSR080L-100CD
265
100
8
260
mSR080L-150CD
365
150
8
360
MX80L
mSR 80
25 mm
Positioner
80 mm
80 mm
Square Rail Versus Cross Roller?
• Cross rollers bearings have long been
touted as superior precision bearing over
that of recirculating… but is this still the
case?
• Square rail technology has improved
significantly over time
• Eliminates the need to preload the stage,
yielding a truer stage
Square Rail Versus Cross Roller?
Manufacturing:
• All linear guide bearing rails are machined
via grinding process
• For 20 years use of linear square rails has
increased (ease of use, breath of product)
• Driven the manufacturing of square rails
to attain the same straightness/flatness as
a cross roller element
Square Rail Versus Cross Roller?
• Difference in
preloading
• Cross Roller: stage
is loaded – flexing
the carriage.
• Square Rail: each
truck is preload in a
consistent fashion
mSR 100
• Second size to the mSR Series
• Allows for smooth precision performance
• Uses the mL18 miniature ironless linear
motor as its drive
• Provides the best dynamic response of any
Parker positioner
• Designed with latest encoder technology
on board
mSR 100 Design Features
1.
Integrated high
precision square rails
2.
Center driven direct
drive ironless linear
motor
Provide guidance,
allows for superior
straightness
/flatness, and
stiffness
3.
With zero cogging this
linear motor produces
extremely smooth
motion, with limited
velocity ripple
Integrated linear
encoder, home and
limits
Six encoder options
for flexible precision
performance, with
adjustable onboard
limits and home
sensing
4.
Convenient mounting
holes and dowel pinning
Allowing for multiple
mounting options to either
an other mSR100, mSR80,
or MX80L
mSR 100 Stroke Performance
Stroke (mm)
25
(LS)
50
(LS/LD)
Motor Load (kg)
100
(LS/LD)
150
(LS/LD)
200
(LS/LD)
12
Continuous Thrust (N)
11
11/16.7
11/16.7
11/16.7
11/16.7
Peak Thrust (N)
33
33/50
33/50
33/50
33/50
Maximum Speed
(mm/sec)
1100
1500
3000
3000
3000
Maximum Acceleration
(G’s)
3
Bi-Directional
Repeatability (µ)1
Straightness and
Flatness (µ)1
1Precision
0.2
3
3
4
grade, with 0.01 micron optical encoder
4
5
mSR 100 Stroke Performance Cont…
Stroke (mm)
250
(LS/LD)
300
(LS/LD)
350
(LS/LD)
Motor Load (kg)
400
(LS/LD)
11/16.7
Peak Thrust (N)
33/50
Maximum Speed
(mm/sec)
3000
Maximum Acceleration
(G’s)
3
Bi-Directional
Repeatability (µ)1
1Precision
500
(LS/LD)
12
Continuous Thrust (N)
Straightness and
Flatness (µ)1
450
(LS/LD)
0.2
5
5
6
grade, with 0.01 micron optical encoder
8
10
12
mSR 100 Performance
mSR 100
Ironless motor
• mL18 miniature Ironless motor options
• LS Option- 3 pole producing 11 N cont., 33 N peak
• LD Option - 5 pole producing 16 N cont., 50 N peak
LS Motor Option
LD Motor Option
mSR 100 Encoder Options
Magnetic
Read Head
Optical
Read Head
• Magnetic incremental with 1 micron resolution
• Highly economical feedback option
• Optical incremental resolutions of 1.0, 0.1, and
0.01microns
• Sine/Cosine output
• Resolution determined by drive interpolation
• BiSS-C Absolute
• For applications requiring constant feedback or zero
initialization (homing)
mSR 100 Versus mSR 80
• If you need relatively basic motion (5
micron repeatability) with a stroke under
200 mm, but want a very compact stage
• Look at the mSR80 with magnetic
encoder
mSR 100 Versus mSR 80
• If you need very precise motion in a tight
package
• Look at the mSR 80 with optical encoder,
and select the optical encoder based upon
your precision needs
What happens if I need to change my
resolution?
• Parker has designed in the latest encoder
technology to the mSR
• Should you select any of the optical
options you can easily switch resolution by
changing our the interpolator
Optical
Read Head
Optical
Interpolator
Optical
Tape Scale
mSR 100 Versus mSR 80
• If you need very precise motion and high
speed
• Look at either the mSR 80 or mSR 100
with sine/cosine encoder.
mSR 100 Versus mSR 80
• If your concerned about producing very
smooth motion with tight control over
velocity ripple
• Look at the mSR 100 with the 10
nanometer optical encoder
Standard Grade and Precision Grade
Standard Grade
Encoder Options
Precision Grade
Magnetic Only
Optical (1, 0.1, and 0.01),
Sin/Cos, and BiSS-C*
Bi-Directional Repeatability
(µ)
5.0
0.11
Accuracy (µ)2
20
4
Straightness & Flatness (µ)2
8
3
Metrology Test Report
No
Yes
Slope Correction
No
Yes
*BiSS-C Absolute option available on mSR100 only.
110 nanometer encoder
225 mm stroke
Compliance CE and RoHS
• Both mSR 80 and 100 are fully CE and
RoHS compliant as standard.
Servo Drive Compatibility
mSR Series
(Motor Option)
mSR 80
(CD Option)
mSR 100
mSR 100
(LS Option) (LD Option)
Continuous Current 0.8
(Arms)
1.6
1.2
2.18
Peak Current
(Arms)
2.4
4.8
3.5
6.5
P-Series1
PD-04
PD-04
PD-04
PD-04
ViX2
ViX250*H
ViX250*H
ViX250*H
ViX250*H
IPA1,2
IPA04-HC
IPA04-HC
IPA04-HC
IPA04-HC
1DC
mSR 80
(CS Option)
Version Required
2Incremental Feedback Only
Multi-Axis Systems
• Given the modular design of the mSR it
can easily be adapted to create multi-axis
systems
• mSR 80 to 80 (same bolt patter as the
MX80L)
mSR 80 XY System
Multi-Axis Systems
• mSR 100 to 100, in two methods
• Standard XY
• Carriage to carriage mounting (eliminates
cable carrier)
mSR 100 Standard XY
mSR 100 Carriage to Carriage XY
Multi-Axis Systems
• The mSR 80 can
also be directly
mounted to the
mSR 100
• Consult the catalog
for standard z-axis
brackets for the
mSR 80 and 100
mSR 80 Z mounted to a mSR 100 X
Questions or Inquiries
[email protected]
1-800-358-9070