Transcript Device Design: Stage 3 (Pressure Actuated Valve Design)

Device Design: Stage 3
(Pressure Actuated Valve Design)
• Using the membrane
dimensions for Stage 3
and a projected maximum
deformation between
30-60 micrometers a
pressure difference of
1.5-2.6 torr is needed.
open
closed
• Deflection Equation
w =0.0318(ab)2 (1-v)/(E*t3)
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P: pressure
E: elastic modulus
v: poisson’s ration
a and b: width and length
of membrane
• w: maximum deflection