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VLSI Design Flow RTL (in HDL) Logic Synthesis Netlist Physical Design Layout CprE566 / Fall 06 / Prepared by Chris Chu Introduction to VLSI Design and Physical Design 1 Full Scaling of MOS Transistors W G S Xj tox Leff D B Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET). The main dimensions that determine device properties are gate oxide thickness tgox; gate length L, gate width W; and junction depth Xj • All horizontal & vertical dimensions of a transistor (W, L, tox, Xj) are reduced by S • All voltages (VDD, VTN, VTP) are reduced by S • Substrate doping (Nsub) is increased by S 2 Simple Scaling Constant Full Voltage Scaling Scaling Parameter Dimensions: width, length, oxide thickness Voltages: supply, threshold Intrinsic gate delay Gate Capacitance Current per device Power dissipation per gate CprE566 / Fall 06 / Prepared by Chris Chu 1/S 1/S 1/S 1 1/S 1/S 1/S 1/S2 1/S2 1/S S S Introduction to VLSI Design and Physical Design 3 Ideal Scaling of VLSI Interconnects Wsp Lint Wint Hint Tox Basic interconnection parameters • Cross Sectional dimensions ( Wint, Hint, Wsp, Tox) are reduced by S • Die Size and global interconnection lengths are increased by Sc 4 Scaling of Local and Global Interconnects Parameter Scaling Factor Cross sectional Dimensions (W int , H int , W sp, t ox ) 1/S 1 ) Wi ntHi nt S2 W int ) tox 1 Resistance per unit length (R i nt = ρi nt Capacitance per unit length (C int = eox RC constant per unit length (R int C int ) S2 Local interconnection length (l loc ) 1/S 2 Local interconne ction RC delay (RintCintlloc ) 1 Die size (D C ) SC Global interconnection length (l int ) SC 2 Global interconne ction RC delay (RintCintl int ) S2(SC)2 Transistor line time of flight (l int /v c ) SC (Fringing and coupling capacitances are neglected) Intrinsic gate delay scaled by 1/S for full scaling. 5 Interconnect vs. Gate Delay 40 Interconnect Delay Gate Delay 35 Delay (ps) 30 25 Metal: Al Dielectric: SiO2 20 15 10 5 0 0.65 0.5 1989 1992 0.35 1995 0.25 0.18 0.13 0.1 1998 2001 2004 2007 Technology Generation(mm) Source: NTRS’97 6 Interconnect vs. Gate Delay 40 Interconnect Delay Gate Delay 35 Delay (ps) 30 25 20 Metal: Cu Dielectric: low k 15 10 5 0 0.65 0.5 1989 1992 0.35 1995 0.25 0.18 0.13 0.1 1998 2001 2004 2007 Technology Generation(mm) Source: NTRS’97 7 Interconnects – Why do we care? (1) ITRS 2001 8 Solutions to Interconnect Delay • Dominating factor in determining circuit performance nowadays. • Solutions: – Copper wire – Low-k (dielectric constant) material – Placement of devices and routing of interconnects become critical – Interconnect optimization (e.g., driver sizing, buffer insertion, wire sizing) at physical design – Consider effects of interconnect delay during synthesis (i.e., physical synthesis) 9