Transcript Advanced Photon Source Nanomotion Diagnostic and Control

OPTODYNE
Argonne
National
Laboratory
OPTODYNE
A linear actuator system with 1-angstrom resolution and 50-millimeter travel
Applicazioni dell'interferometria laser ad alta risoluzione
Applications of high-resolution laser interferometry
Gianmarco Liotto
Optodyne Laser Metrology srl
Via Veneto,5 20044-Bernareggio (MI )
+39 039 6093618
[email protected]
http://www.optodyne.com/
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
OUTLINE
Introduction
Laser
Doppler Encoder with SubAngstrom Sensitivity
High-Stiffness
Weak-Link Linear
Motion Reduction Mechanism
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Since 1997 an ultraprecision motion
control techniques have been developed
at the APS, Argonne National Laboratory
with the support of OPTODYNE, inc.
The novel laser Doppler encoder system;
is a valuable measuring tool in the study
of a crystal’s vibrational behavior because
it has nanoradian sensitivity.
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel

A commercial Laser Doppler Displacement Meter (LDDM) system includes
four components: a laser head, a processor module, a display module, and a
target reflector. The laser head houses a frequency-stabilized HeNe laser,
an electro-optic assembly and a photodetector, which functions as a
receiver. The laser light reflected by the target is frequency shifted by the
motion of the target. The photodetector measures the phase variation
caused by the frequency shift, which corresponds to the displacement of the
target.

When the displacement is larger than the half-wavelength, l/2, a counter
records the total phase changes as:
Df total = 2p N + f ,
(1)
where N is the number of half-wavelengths,
and f is the phase angle less than 2p.
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
The total target displacement, Dz, can be expressed as:
c
Dz = ------ (N + f/2p)
2f0
,
(2)
where f0 is the frequency of the laser, and c is the speed of the light.
If we make the laser light reflecting back and forth M times between the fixed base
and the target before it finally reach the photodetector, then introducing
equation (2) gives
c
Dz = --------- (N + f/2p)
(3)
2f0 M
,
which indicates that the multiple-reflection optics provides M-times resolution
extension power for the system.
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Multiple-reflection optics for the laser Doppler displacement meter (LDDM)
The laser Doppler displacement meter is based on the principles of radar, the Doppler
effect, and optical heterodyning. We have chosen a LDDM as our basic system, not only
because of its high resolution (2 nm typically) and high measuring speed (2 m/s) but also
because of its unique performance independent of polarization, which provides the
convenience to create a novel multiple-reflection-based optical design to attain subAngstrom linear resolution extension.
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Multiple-reflection optics for the laser Doppler displacement meter (LDDM)
Argonne National Laboratory
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
OPTODYNE
 Test of a Laser Doppler Linear Encoder (LDLE)
A prototype LDLE system having an extension with optical resolution from twenty-four multiple
reflections has been developed and tested at the Advanced Photon Source. A precision
stepping-motor-driven stage has been used to test the LDLE over a 300-mm measuring range.
Measuring Range Test for LDLE with Optical Resolution Extension
400
Readout with Optical Resolution Extension
(1 = 0.0833333 cm)
350
300
250
200
150
100
50
0
0
5
10
15
20
Readout from Commercial LDDM (cm)
25
30
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
 Test of a Laser Doppler Linear Encoder (LDLE)
The resolution of the custom-made commercial LDDM system, which was used during this test,
was 2 nm (1 nm LSB), so that, theoretically, a 0.166 nm resolution (0.083 nm LSB) was reached
by the prototype LDLE system.
LDLE Test with Queensgate PZT Driver 6.8 nm Jumps
1.30E+03
LDLE Readout (1 unit = 0.0833 nm)
1.20E+03
1.10E+03
1.00E+03
9.00E+02
8.00E+02
56
66
76
Time (1 unit = 0.2 sec)
86
96
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Calibration for a High-stiffness Weak-link Linear Motion Reduction Mechanism
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Prototype of a laser Doppler linear actuator system (LDLA) with sub-angstrom
sensor resolution and positioning resolution over a 50-mm travel range.
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Prototype of a laser Doppler linear actuator system (LDLA) with sub-angstrom
sensor resolution and positioning resolution over a 50-mm travel range.
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Setup for Large Field Atomic Probe Microscope Test with LDLA
Argonne National Laboratory
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
OPTODYNE
Test of a LDLA closed-loop feedback system
Comparison of Open loop and Closed loop
20.0
1.0
0.8
0.6
15.0
0.4
0.2
0.0
-0.2
-0.4
10.0
-0.6
-0.8
-1.0
Angstrom
3
3.1
3.2
3.3
3.4
3.5
3.6
3.7
3.8
3.9
4
5.0
0.0
-5.0
-10.0
-15.0
0
1
2
3
4
5
6
7
8
9
10
Time (s)
11
12
13
14
15
16
17
18
19
20
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Laser Doppler Linear Actuator Test
01928-52627pm.dat
9
8
Displacement (Angstorm)
7
6
5
4
3
2
1
0
-1
0
10
20
30
40
Time (sec)
50
60
70
Argonne National Laboratory
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
OPTODYNE
LDLA Active Vibration Control Test
0272-64210pm.dat
40
Displacement (Angstrom)
30
20
10
0
-10
-20
-30
-40
92
93
94
95
Time (sec)
96
97
98
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Prototype of a two-dimensional laser Doppler linear actuator system (LDLA) with
subnanometer positioning resolution over a 50 mm x 50 mm travel range
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
Prototype of a two-dimensional laser Doppler linear actuator system (LDLA) with
subnanometer positioning resolution over a 50 mm x 50 mm travel range
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator MULTIPLE
system with 1-angstrom
PASS ADAPTER
resolution and 50-millimeter travel
A 6-pass optical arrangement achieved by an optical
adapter and a 25mm diameter retroreflector .
Argonne National Laboratory
OPTODYNE
A linear actuator MULTIPLE
system with 1-angstrom
PASS ADAPTER
resolution and 50-millimeter travel
OPTODYNE
Effect of air circulation on a 6-pass optical arrangement
and on a single pass optical arrangement.
6 - p a s s v s s in g le
0
10
20
30
40
50
60 t i m
e, sec
0
-0,1
-0,5
Multi 6
Single
Argonne National Laboratory
Laser Measuring
A linear actuator system with 1-angstrom
System LDDM
resolution and 50-millimeter travel
OPTODYNE
OPTODYNE
•Includes:
•Retroreflector
•Processor box
•Laser Head
•Performances
•Resolution
1.2nm
•Speed 5m/s
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel

We have contributed to built a compact linear actuator system
with 1-Angstrom closed-loop control resolution and 50-mm
travel range.

Two special techniques were developed for this ultraprecision
motion control system. A laser Doppler encoder system with
multiple-reflection optics has demonstrated its sub-Angstrom
linear sensitivity. A specially designed high-stiffness weak-link
linear motion reduction mechanism provided sub-Angstrom
driving sensitivity with high stability.

Further developments of the LDLA system are focused on the
compactness of the two-dimensional system and optics for
differential measurements for X-ray nanoprobe applications.
Argonne National Laboratory
OPTODYNE
OPTODYNE
A linear actuator system with 1-angstrom
resolution and 50-millimeter travel
References
[1] Deming Shu, Yufeng Han, Thomas S. Toellner, and Esen E. Alp A linear actuator system with 1-angstrom
closed-loop control resolution and 50-millimeter travel range July 8, 2002 OPTOMECHANICS 2002, SPIE
[2] D. Shu, E. E. Alp, J. Barraza, and T. M. Kuzay, A Novel Laser Doppler Linear Encoder Using Multiple-Reflection
Optical Design for High Resolution Linear Actuator, Proceedings of SPIE, Vol.3429 (1998)284-292.
[3] D. Shu, T. S. Toellner, and E. E. Alp, Ultraprecision Motion Control Technique for High-Resolution X-ray
Instrumentation, Proceedings of the 1st International Workshop on Mechanical Engineering Design of
Synchrotron Radiation Equipment and Instrumentation, July 14, 2000, PSI-SLS, Switzerland.
[4] D. Shu, T. Toellner, and E. E. Alp, Novel Miniature Multi-Axis Driving Structure with Nanometer Sensitivity for
Artificial Channel-Cut Crystals, Synchrotron Radiation Instrumentation: Eleventh US National Conference, ed.
P. Pianetta, Am. Inst. Physics, Conf. Proceedings vol 521 (2000) 219.
[5] D. Shu, T. S. Toellner, and E. E. Alp, Modular Overconstrained Weak-Link Mechanism for Ultraprecision Motion
Control, Nucl. Instrum. and Methods A 467-468, 771-774 (2001).
[6] LDDM is a trademark of the Optodyne Inc., 1180 Mahalo Place, Compton, CA 90220, U.S.A.
[7] Wang C. P., (1987), Laser & Optronics, Sept., p69-71.
[8] Wang C. P., (1977), American Scientist, 65 (3), p289-293.
[9] D. Shu, (2001), Patent application in progress.
[10] U.S. Patent granted No. 5,896,200, Optical design for laser encoder resolution extension and angular
measurement, D. Shu, 1999.