Transcript Document
Welcome to the
In Sutardja Dai Hall
a Recharge Center of
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Orientation Agenda
Introduction
Bill Flounders, Executive Director
Computer Systems
Olek Proskurowski, Computer Systems Manager
Administration
Neal Melton, Administrative Manager
Laboratory Safety
Bob Hamilton, Equipment Manager
Processing
Ryan Rivers, Jeff Clarkson, Rich Hemphill
Process Engineers
Etiquette
Jeff Clarkson, Process Engineer
Laboratory Tour
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Bill’s Agenda
Laboratory Big Picture
Membership Overview
Operations Concept
Recharge Information
The Marvell NanoLab
CITRIS and Sutardja Dai Hall
Lab
Level 2
Lab
Level 1
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CITRIS
Headquarters
Building =
Sutardja-Dai
Hall
Marvell
Nanofabrication
Laboratory
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Laboratory Design Specifications
Bay and chase with open side wall for air return
Proven cost effective for University R&D
2 separate floors of cleanroom
internal stairway and elevator, single-floor
gowning
Class100 / VC-E / plenum supply/ <3mG stray AC
Class1000 / VC-C / ducted HEPA
Upper Level = 5
Lower Level = 3
H6 hazard classification in the lab
semiconductor manufacture approved
potential future requirement of funding agencies
approved for all toxic and pyrophoric gases
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6
Gas /Chemical
Storage Room
Clean Room
Bays
Login
Terminals
Main
Utility
Aisle
Return
Air
Chases
Gowning
Entrance
7
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Upper Lab Level = 5th Floor
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Gas /Chemical
Storage Room
Clean Room
Bays
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Lower Lab Level = 3rd Floor
Main
Utility
Aisle
Return
Air
Chases
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Lab Members by Department
FY 13 Total = 471
2013
471
UCB:
340
External: 131 (28%)
2012
497
UCB:
372
External: 125 (25%)
2011
474
UCB:
353
External: 121 (26%)
2010
469
UCB:
370
External: 99 (21%)
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Berkeley Nanofabrication
Laboratory Affiliates (BNLA)
Companies request access to the NanoLab for experimental work, subject
to recharge fees. Primarily but not exclusively start ups
Director reviews Company’s proposed use and verifies it does not conflict
with “academic research priorities”.
Approximately 20% membership and 30% of income.
Companies pay an annual membership fee and higher recharge rates.
Commercial researchers are considered and are contributing members to
the laboratory
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Operational Model
A shared laboratory with a very low barrier to entry,
creating a large, thriving multi-disciplinary community
The shared model implies professional administration
and support staff, funded by “per use” fees. The benefits
of the model are significant:
more efficient use of valuable laboratory space and specialized
research equipment
significant improvement in quality of support; researchers
enabled to focus upon results not maintenance
maximum PI research flexibility integrating strategically
selected, diverse cutting edge capabilities around a stable
silicon baseline
enhanced research cross fertilization
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NanoLab Culture
The NanoLab is a Research Community
- you are a NanoLab Member Not a User
- this is a highly diverse lab environment
The Process and Equipment Staff are Community Leaders.
Staff provide information, guidance and equipment /process
development. They don’t do your work for you
Every tool has a primary and a back up equipment and process
engineer.
Every tool has a standard process. Equipment is considered up
when results of the standard process are within specifications.
Process staff execute standard process after major repair and
according to periodic schedule called Quality Monitoring
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The NanoLab is a toolbox
the Lab Manual is your tool list
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FY14/15 Academic
Recharge Rates
Category
Access Fee
$92.60
General Laboratory Rate
$44.40
General Lab Rate Max
$1,332.00
Special Equipment Rate
$42.00
Special Equip Rate Max
$1,540.00
Special Equip Volume Rate
E-beam Lithography
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FY 2014/15
$6.00
$110.40
High Performance SEM
$60.00
Staff Services
$78.60
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FY14/15 BNLA
Recharge Rates
Category
Access Fee
General Laboratory Rate
General Lab Rate Max
Special Equipment Rate
E-beam Lithography
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FY 2014/15
$108.65
$47.40
$2,300.00
$50.40
$124.20
High Performance SEM
$72.00
Staff Services
$78.60
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FY14/15 BNLA
Membership Fees
Yearly BNLA Fee
Lab
Members/Co
mpany
Previous
(since 2001)
Effective 7/1/13
Effective 7/1/14
1
$15,000
$17,500
$17,500
2
$25,000
$27,500
$27,500
3-4
$35,000
$37,500
$37,500
5–6
$50,000
$55,000
$55,000
General Cap
$1600
$2200
$2300
Equip Cap
None
None
None
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Detailed Billing Statement is
Provided Each Month
Available on-line at all times
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Closing Notes
The NanoLab is open for work 24 hours a day, all through the year (accessible with a cardkey).
For safety reasons, you may not work alone in the lab at any time. There must be
at least two people inside when working off hours (other than 7:00 am – 5:00 pm).
We ask that new students work only Monday - Friday, between 8 am - 5 pm, when staff is available,
unless there is a senior student with them from their own research group.
Students learn from each other and, in turn, teach others. Motto: "Each one teach one."
Information available on our website at http://nanolab.berkeley.edu.
Questions/advice/help: send e-mail to “[email protected]”
Lab member updates and information are sent by email. Please read your NanoLab mail regularly; do not ignore
mail from us!
Everyone qualifies separately to use each piece of equipment needed. This lab course qualifies you only to enter
the lab and use the computer.
Safety quiz: Once a year. You will receive an automated reminder 30 days prior to your account cancellation
deadline.
Twice a year everyone participates in a clean-up event. This helps to raise consciousness and maintain awareness
of your responsibilities to the facility and to other students.
Visitors: Only by permission. Visitors are only allowed during staff working hours; they must be escorted;
photographs are allowed. E-mail requests to [email protected].
Credits: Devices fabricated in the UC Berkeley Marvell Nanofabrication Laboratory.
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Thank You !
For any Lab related questions, please contact:
Marvell NanoLab Executive Director
Dr. Bill Flounders
bill at eecs.berkeley.edu
or
Marvell NanoLab Faculty Director
EECS Professor Ming Wu
Wu at eecs.berkeley.edu
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