Transcript Document

Welcome to the
In Sutardja Dai Hall
a Recharge Center of
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Orientation Agenda
 Introduction
 Bill Flounders, Executive Director
 Computer Systems
 Olek Proskurowski, Computer Systems Manager
 Administration
 Neal Melton, Administrative Manager
 Laboratory Safety
 Bob Hamilton, Equipment Manager

Processing
 Ryan Rivers, Jeff Clarkson, Rich Hemphill
Process Engineers
 Etiquette
 Jeff Clarkson, Process Engineer
 Laboratory Tour
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Bill’s Agenda
 Laboratory Big Picture
 Membership Overview
 Operations Concept
 Recharge Information
The Marvell NanoLab
CITRIS and Sutardja Dai Hall
Lab
Level 2
Lab
Level 1
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CITRIS
Headquarters
Building =
Sutardja-Dai
Hall
Marvell
Nanofabrication
Laboratory
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Laboratory Design Specifications

Bay and chase with open side wall for air return
 Proven cost effective for University R&D

2 separate floors of cleanroom
 internal stairway and elevator, single-floor
gowning
 Class100 / VC-E / plenum supply/ <3mG stray AC
 Class1000 / VC-C / ducted HEPA
Upper Level = 5
Lower Level = 3

H6 hazard classification in the lab
 semiconductor manufacture approved
 potential future requirement of funding agencies
 approved for all toxic and pyrophoric gases
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Gas /Chemical
Storage Room
Clean Room
Bays
Login
Terminals
Main
Utility
Aisle
Return
Air
Chases
Gowning
Entrance
7
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Upper Lab Level = 5th Floor
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Gas /Chemical
Storage Room
Clean Room
Bays
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Lower Lab Level = 3rd Floor
Main
Utility
Aisle
Return
Air
Chases
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Lab Members by Department
FY 13 Total = 471
2013
471
UCB:
340
External: 131 (28%)
2012
497
UCB:
372
External: 125 (25%)
2011
474
UCB:
353
External: 121 (26%)
2010
469
UCB:
370
External: 99 (21%)
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Berkeley Nanofabrication
Laboratory Affiliates (BNLA)

Companies request access to the NanoLab for experimental work, subject
to recharge fees. Primarily but not exclusively start ups

Director reviews Company’s proposed use and verifies it does not conflict
with “academic research priorities”.

Approximately 20% membership and 30% of income.

Companies pay an annual membership fee and higher recharge rates.

Commercial researchers are considered and are contributing members to
the laboratory
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Operational Model
 A shared laboratory with a very low barrier to entry,
creating a large, thriving multi-disciplinary community
 The shared model implies professional administration
and support staff, funded by “per use” fees. The benefits
of the model are significant:
more efficient use of valuable laboratory space and specialized
research equipment
significant improvement in quality of support; researchers
enabled to focus upon results not maintenance
maximum PI research flexibility integrating strategically
selected, diverse cutting edge capabilities around a stable
silicon baseline
enhanced research cross fertilization
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NanoLab Culture
 The NanoLab is a Research Community
- you are a NanoLab Member Not a User
- this is a highly diverse lab environment
 The Process and Equipment Staff are Community Leaders.
Staff provide information, guidance and equipment /process
development. They don’t do your work for you
Every tool has a primary and a back up equipment and process
engineer.
Every tool has a standard process. Equipment is considered up
when results of the standard process are within specifications.
Process staff execute standard process after major repair and
according to periodic schedule called Quality Monitoring
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The NanoLab is a toolbox
the Lab Manual is your tool list
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FY14/15 Academic
Recharge Rates
Category
Access Fee
$92.60
General Laboratory Rate
$44.40
General Lab Rate Max
$1,332.00
Special Equipment Rate
$42.00
Special Equip Rate Max
$1,540.00
Special Equip Volume Rate
E-beam Lithography
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FY 2014/15
$6.00
$110.40
High Performance SEM
$60.00
Staff Services
$78.60
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FY14/15 BNLA
Recharge Rates
Category
Access Fee
General Laboratory Rate
General Lab Rate Max
Special Equipment Rate
E-beam Lithography
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FY 2014/15
$108.65
$47.40
$2,300.00
$50.40
$124.20
High Performance SEM
$72.00
Staff Services
$78.60
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FY14/15 BNLA
Membership Fees
Yearly BNLA Fee
Lab
Members/Co
mpany
Previous
(since 2001)
Effective 7/1/13
Effective 7/1/14
1
$15,000
$17,500
$17,500
2
$25,000
$27,500
$27,500
3-4
$35,000
$37,500
$37,500
5–6
$50,000
$55,000
$55,000
General Cap
$1600
$2200
$2300
Equip Cap
None
None
None
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Detailed Billing Statement is
Provided Each Month
Available on-line at all times
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Closing Notes

The NanoLab is open for work 24 hours a day, all through the year (accessible with a cardkey).
For safety reasons, you may not work alone in the lab at any time. There must be
at least two people inside when working off hours (other than 7:00 am – 5:00 pm).
We ask that new students work only Monday - Friday, between 8 am - 5 pm, when staff is available,
unless there is a senior student with them from their own research group.

Students learn from each other and, in turn, teach others. Motto: "Each one teach one."

Information available on our website at http://nanolab.berkeley.edu.

Questions/advice/help: send e-mail to “[email protected]”

Lab member updates and information are sent by email. Please read your NanoLab mail regularly; do not ignore
mail from us!

Everyone qualifies separately to use each piece of equipment needed. This lab course qualifies you only to enter
the lab and use the computer.

Safety quiz: Once a year. You will receive an automated reminder 30 days prior to your account cancellation
deadline.

Twice a year everyone participates in a clean-up event. This helps to raise consciousness and maintain awareness
of your responsibilities to the facility and to other students.

Visitors: Only by permission. Visitors are only allowed during staff working hours; they must be escorted;
photographs are allowed. E-mail requests to [email protected].

Credits: Devices fabricated in the UC Berkeley Marvell Nanofabrication Laboratory.
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Thank You !
For any Lab related questions, please contact:
Marvell NanoLab Executive Director
Dr. Bill Flounders
bill at eecs.berkeley.edu
or
Marvell NanoLab Faculty Director
EECS Professor Ming Wu
Wu at eecs.berkeley.edu
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