Transcript Aucun titre de diapositive

Angstrom Advanced Inc.
Who we are:
Angstrom Advanced is the leading supplier for ellipsometers. We
offer full range of ellipsometers for thin film thickness measurement
and optical characterization for refractive index and extinction
coefficient (n & k). The Angstrom Advanced ellipsometer family
includes discrete wavelength ellipsometers (single wavelength
ellipsometers and multi-wavelength ellipsometers), deep UV, UV,
VIS, NIR and IR spectroscopic ellipsometers. Our ellipsometers
have been delivered to many renowned universities, research
institutes and companies worldwide. Angstrom Advanced's goal is to
supply the most accurate and repeatable ellipsometers with the
highest standard of customer satisfaction. Many upgrade accessories
are available for different applications.
What we do:
PHE101 Discrete Wavelength
Laser Ellipsometer
PHE101 Multi-Wavelength
Ellipsometer
PHE102 UV/VIS NIR
Spectroscopic Ellipsometer
PHE103 UV/VIS NIR
Spectroscopic Ellipsometer
PHE104 Infrared Spectroscopic
Ellipsometer
Angstrom Advanced Inc is one of the largest suppliers for
ellipsometers in the world and we have the widest range of
ellipsometers in the globe. We offers the ellipsometers, after-sales
service, training and contract laboratory testing services.
Angstrom Advanced Inc.. – 1056 Washington St., Canton, MA 02021
Tel. : 617-202-3880 Fax : 617-202-3878
Email: [email protected]
1．PHE-101 Discrete Wavelength Ellipsometer
Parameters：

Light Source: He-Ne

Wavelength: 632.8nm

Accuracy of film thickness: 0.005nm

Accuracy of Refractive index: 0.001

Measurement speed: Less 1 second

Incident angle：20 to 90，5/Step

Thickness range：0-6,000nm


Full material library;
Functions/Features：

Data and graph output function;
Thin film’s thickness, refractive index and

Based on windows XP operation system;
extinction coefficient, single or Multi-layer;


Integrated data acquisition, analysis software;
Second laser is used to make alignment most

Sample size up to 300mm;
convenient and accuracy;

wide applications, such as dielectrics,
Economical cost.
semiconductors, metal, organics and more;
Angstrom Advanced Inc.. – 1056 Washington St., Canton, MA 02021
Tel. : 617-202-3880 Fax : 617-202-3878
Email: [email protected]
2．PHE-101Multi-Wavelength Ellipsometer
Parameters：

Light Source：He-Ne and semiconductor Lasers

Wavelength: 532, 632.8, 1064nm, …

Accuracy of film thickness: 0.005nm

Accuracy of refractive index: 0.0005

Incident angle：20 to 90，5/Step

Repeatability： Psi=0.01，Delta=0.02

Thickness range: 0-10,000nm
Functions/Features:

Integrated data acquisition, analysis software；

Thin film’s thickness, refractive index and extinction coefficient, single layer or multi-layer;

Second Laser is used to make alignment most convenient and accuracy;

Full material library, generate Psi and Delta with any sample structures;

Simulate experimental data and give fitting parameter values, confidence and correlation matrix;

Full Cauchy, EMA, Lorenz et. al. dispersion formula and a lot of database;

User can build own dispersion formula and database;

Data and graph output function.
Angstrom Advanced Inc.. – 1056 Washington St., Canton, MA 02021
Tel. : 617-202-3880 Fax : 617-202-3878
Email: [email protected]
3．PHE-102 UV/VIS NIR Spectroscopic Ellipsometer
Parameters：

Wavelength: 250-1100nm(190-1100nm),
250-1700nm(250-2300nm);

Incident angle：20 to 90，5/Step;

Repeatability： Psi=0.01，Delta=0.02 ;

Thickness range 0-30,000nm
Functions/Features：

Film’s thickness, refractive index and extinction coefficient, single or
multi-layer;

Powerful software with full materials library, Full Cauchy, EMA,
Lorenz et. al. dispersion formula and a lot of database;
 Transmittance and reflectance
 Automated angle of incidence 20- 90(optional), Wafer Mapping & Motorized X-Y Sample stage, 3D graph display (optional);
Angstrom Advanced Inc.. – 1056 Washington St., Canton, MA 02021
Tel. : 617-202-3880 Fax : 617-202-3878
Email: [email protected]
4．PHE-103 UV/VIS, NIR Spectroscopic Ellipsometer
Parameters：

Wavelength: 250-1100nm(190-1100nm), 250-1700nm
(250- 2300nm);

Incident angle：20 to 90，automated 0.01/Step;

Repeatability： Psi=0.01，Delta=0.02 ;

Vertical Sample stage
Functions/Features：

Film’s thickness, refractive index and extinction coefficient, single or multi-layer;
 Powerful software with full materials library, Full Cauchy, EMA, Lorenz et. al. dispersion formula
and a lot of database;
 Transmittance and reflectance;
 Automated angle of incidence 20-20- 90(optional), Wafer Mapping & Motorized X-Y Sample stage,
3D graph display (optional);
Angstrom Advanced Inc.. – 1056 Washington St., Canton, MA 02021
Tel. : 617-202-3880 Fax : 617-202-3878
Email: [email protected]
5．PHE-104 Infrared Spectroscopic Ellipsometer
Parameters：

Wavelength: 4000-400cm-1(2.5-25um)

Beam size: 1X34mm

Automated incident angle：35 to 90，
0.01/Step
Functions/Features：

Film’s thickness, N & K measurement;

Resistivity measurements and doping profiles;
 Identification of chemical bonds and buried layers investigation ;
 Transmittance and reflectance;
Angstrom Advanced Inc.. – 1056 Washington St., Canton, MA 02021
Tel. : 617-202-3880 Fax : 617-202-3878
Email: [email protected]