Transcript Document

Summary of Sensor Quality Tests
List of Problems
F. Hartmann, CMS Tracker Collaboration
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
1
Total Number of Sensor Delivered
Type
Received
Measured Rejected
Accepted*
OB2
1407
1399
535
846
OB1
224
223
99
124
W5A
53
53
17
36
W5B
33
12
3
9
W6A
45
45
27
18
W6B
28
14
4
10
W7A
32
20
2
18
W7B
12
12
1
11
*Passing CMS QTC tests
February 14, 2003
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
2
Summary of Quality Tests
Restrict summary and discussion to sensors delivered after
December 1, 2002 (introduction of new QA steps):
187 OB2
32 W7A
20 W5B
12 W7B
10 W6B
261 Sensors in total
Measured
246
March 17, 2003
Catania, Meeting ST - CMS
Accepted
Rej. Optic.
Rej. IV
Rej. strips
219
5
9
17
89%
2%
3.7%
7%
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
3
Sensors to be rejected
Sensors measured in Vienna: 32
sensor ID
optical I_450(µA) Vbreak
30211322292717
30211422292910
30211322412101
Sensors measured in Perugia: 127
30210420383204
chip
30210421850212
20.7
30210421850214
16.72
30210422066323
17.2
30210422068004
30210422302724
30210423860203
30210423860204
30210423860213
30210423860215
30210423860224
30210423860508
24.04
30210423860521
30210423860522
30210423863921r eceived broken
30210423863922
30210423974210
chip
Sensors measured in Karlsruhe: 27
30211023185021 C
30211023752820 C
30211023752823
26.089
Vdepl
Nr.of
bad strips
18
7
ST Data:
I_450(µA)
Ileak
Pinholes Cac
3
2
5
Rpoly
14
2
2
450
450
185.99
1
4
1
9
9
6
3
3
2
2
2
1
5
2
5
9
6
6
12
8
1
4
2
2
8
5
1
1
5
2
1
3
6
5
Cac
3
3
5
2
0
3
Rpoly
data not available
8.75
105
7
6
6
9
8
6
12
8
Nr. of
bad strips Pinholes
2.56
2.34
1.02
1
2
2
2
0
data not available
data not available
data not available
data not available
data not available
data not available
data not available
data not available
data not available
data not available
data not available
data not available
Sensors measured in Pisa not included.
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
4
Checklist for Pre-Series Qualification
Pre-series completed
Not yet
Delivery procedure
ST resumed with e-mail notification, still some inconsistencies
Bar code
o.k.
Data format
o.k., several files missing
Mask design
Correct for all sensors
W7B test structure wrong
QTC
IV problem, scratches, number of bad Cac
PQC
o.k., assuming ST applies Flatband Voltage cut at 10 V
Longtime test
o.k.
p-irradiation
o.k.
n-irradiation
o.k.
Bonding test
o.k., 2 batches needed cleaning ?
% accepted sensors
~ 90 %
Goal of qualification not yet reached.
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
5
Optical Inspection I
Quality of cut edges has significantly improved.
Still some sensors outside specifications (last delivery).
Further improvement needed.
1342 m
549 m
20383204
Back view
Still 4 rejects out of 261
1464 m
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
6
Optical Inspection II
Many scratches on the surface of almost all sensors:
In many cases no electrical failure.
In other cases broken or shorted aluminium lines !
23412505
bad Cac
short
23412517
23412513
Where and how are these scratches introduced ?
Can these scratches be avoided with new scheme skipping IV after cutting?
Agreed to try on 1000 OB2 sensors.
But then we are even more concerned about cutting defects effecting
the IV performance. (On single strip basis & and on overall performance!)
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
7
Bad Cac values
Two cases:
• Bad Cac values correlated with scratches. (shorts & opens)
• One batch (4 sensors):
All sensors having hundreds of too low Cac values.
AUTOMATIC Cac CAPACITORS MEASUREMENT
Is this or will this be introduced ????
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
8
IV problem - breakdown I
Example of W7A, W7B & W6A, W6B sensors:
-5
Leakage Current [A]
Limit
10
-6
10
-7
10
-8
10
ddg
f
de
dd
dc
zdb
vccxcyda
tccw
ccs
rccu
lccncocpq
j ccm
ccg
fchccick
cce
ccbcd
ca
bz
by
b
x
bw
DG
DF
tbv
DE
DD
DC
DB
bbs
rbbu
DA
bq
CZ
CY
bp
CX
bo
CW
CV
CU
CT
CS
bbm
lbn
CR
CQ
CP
CO
CN
bbj
ibk
CM
CK
bbg
fbh
CCJ
I CL
CH
be
CG
CF
bd
CE
bc
CD
CC
bb
CB
ba
CA
BZ
az
BY
BX
ay
BW
ax
BV
BU
aw
BT
BS
av
BR
BQ
au
BP
at
BO
BN
as
BM
BL
ar
BK
aq
BBJ
I
BH
ap
BG
BF
ao
BE
an
BD
BC
am
BB
al
BA
AZ
ak
AY
AX
aj
AW
ai
AV
AU
ah
AT
ag
AS
AR
af
AQ
AP
ae
AO
ad
AN
AM
ac
AL
AK
ab
AJ
aa
AI
AH
z
AG
y
AF
x
AE
AD
w AC
v ZAB
110
111
AA
109
107
108
106
105
103
104
102
u
100
101
99
97
98
96
95
93
94
92
90
91
89
87
88
86
85
83
84
82
81
79
80
78
76
77
75
74
72
73
71
70
Y
69
67
68
66
65
64
63
62
60
61
59
58
57
56
55
54
53
52
51
50
49
48
sTtUVWX
47
46
45
44
43
42
41
40
39
38
37
36
35
34
rS
33
32
31
30
29
28
27
26
qR
25
24
Q
23
22
p17
P
21
20
O
o16
19
N
18
n15
M
L13
lm
K
14
k12
J
j
I
11
i
H
h910
g
FfG
78
E
e6
D
d5
c4
1
C
b3
A
B
2
a
30211023185001
30211023185002
30211023185005
30211023185009
30211023185010
30211023185017
30211023185022
30211023752801
30211023752802
30211023752805
30211023752806
30211023752810
30211023752813
30211023752814
30211023752817
30211023752818
30211023752821
30211023752822
30211023752823
A
1
0a
100
200
300
400
500
600
Voltage [V]
Correlation observed: Sensors with higher leakage current have strips
with high leakage current AND
strips with high leakage current are often in areas with scratches!
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
9
IV problem - breakdown II
Time dependence observed for some sensors.
Important to agree on test procedure.
longtime
5
4.5
4
30211322292506_2
3.5
current [uA]
30211322292506_3
30211322292506_1
3
30211322292720_1
30211322292720_2
2.5
30211322292720_3
30211322292518_1
2
30211322292518_2
30211322292518_3
1.5
1
0.5
0
0
20
40
60
80
100
120
140
160
time [h]
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
10
Same IV up to “soft strip breakdown”
ST
Karlsruhe
1E-5
First strip
Second strip
current [A]
1E-6
1E-7
1E-8
0
100
200
300
400
500
600
bias voltage [V]
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
11
Leaky strips -- scratches
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
12
Hints
•
•
•
•
Almost each high IV sensor has a few „high leaky“ strips!
Σ leaky strips ~ IV ( few strips drive IV)
EACH leaky strip is scratched ! – not all scratched strips are leaky
Clear correlation between IV and leaky strips and scratches on
sensors observed!
• No IV-breaks on Minisensors!  different handling !
 Scratch test:
– Scratchtest on minisensors to reproduce effect
• Needle
• Pencil (2B)
• screwdriver
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
13
Scratches on minisensor
„Soft“ scratches with probe needle
Carbon residues of pencil
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
14
Deep scratches on minisensor
„Not-so-SOFT“
scratches
with
screwdriver
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
15
Global IV and Individual strip IV
Total current
Single strip current
undamaged
small scratch with needle
deep scratch with needle
scratched with pencil 2B
scratched with screwdriver
1,80E-007
1,60E-007
1E-8
current [A]
1,20E-007
x3
1,00E-007
8,00E-008
strip current [A]
1,40E-007
1E-9
strip 5 (not damaged)
strip 8
strip 9
strip 10
strip 11
strip 13
x70
6,00E-008
1E-10
4,00E-008
2,00E-008
0
100
200
0,00E+000
0
100
200
300
400
500
600
300
400
500
600
bias voltage [V]
bias voltage [V]
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
16
Strip scan (Current)
undamaged
small scratch with needle
deep scratch with needle
scratched with pencil 2B
scratched with screwdriver
current [A]
1E-8
Undamaged minisensor @ 400V:
Ileak ~ 0,2nA x 192 strips ~ 35nA
IV
~ 38nA
Damaged minisensor @ 400V:
 Ileak damaged strips
~ 55nA
 Ileak all
~ 100nA
1E-9
IV
~ 120nA
1E-10
0
5
10
15
20
25
30
strip number
A few single strips show high leakage current!
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
17
Idiel on scratched Minisensor
1E-5
1E-6
No pinholes created!
1E-7
Idiel [A]
1E-8
1E-9
1E-10
1E-11
1E-12
1E-13
0
5
10
15
20
25
30
strip number
Effect is located in the Al layer, above the oxide!
 CMS sensors have metal strip overhang!!!
Scratches remove the overhang and introduce pointlike defects
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
18
Total leakage current [A]
Scratch on bias & guard (minisensor)
1,0x10
-8
5,0x10
-9
No scratch on minisensor
0,0
0
200
400
600
800
1000
Voltage [V]
Total leakage current [A]
2,0x10
-5
Scracht on bias and guard
Exploded view
1,0x10
-5
0,0
-1,0x10
-5
0
200
400
600
800
1000
Voltage [V]
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
19
Preliminary field simulations (with ISE TCAD)
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
20
Solution!?!
Scratches -obviously happening very late in the
measuring procedure at ST- are critical!
Avoiding scratches will certainly improve
the yield with respect to CaC (strip failure) , leaky
strips (strip failure) and to global IV!
BUT
There is no guarantee, that avoiding scratches solves
ALL problems!
Is it enough to skip the IV after cutting?????
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
21
Update Contact Persons
General
Technical
Mask Design
Contract and Payment
Schedule
Shipments
Data Files
March 17, 2003
Catania, Meeting ST - CMS
CMS
M. Krammer
M. Krammer
E. Focardi
M. Mannelli
A. Cattai
M. Krammer
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
ST
G. Fallica
G. Valvo
G. Valvo
G. Di Stefano
G. Mendola
G. Kauerauf
22
CMS Module Production
CMS Tracker collaboration has to produce ~15000 silicon
detector modules until end of 2004.
We need to procure 19000 ST sensors in 2 years production time.
During full production only samples of sensors can be tested by CMS.
We have to relay on Quality Control by ST !
Acceptance limit on sensor failure is max 1% !
Due to delays in pre-series production the time schedule is very tight and
we have to compress the module production.
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
23
Example of a CMS Module
A module consists of 2 sensors, electronic hybrid, 4-6 APV chips,
pitch adapter, carbon frame, etc.
For many sensors: The first test of silicon sensor after ST quality control is
on an assembled module.
Replacement of single sensors is basically impossible!
The present failure rate of 10% is not acceptable
 20% of all modules would fail!
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
24
Summary
• Strip failure: Add. measurements by CMS
– CaC AUTOMATIC Cac CAPACITORS MEASUREMENT!?!
– Leaky Strips (scratches only??)
•
•
•
•
IV (scratches only??)
Optical inspection has to be improved!
Some improvements in the shipping logistic needed!
Acceptance rate must be increased to 99%
– Otherwise sensor failure will be detected about 1 year later
(2 sensors assembled together with electronics and mechan. parts)
March 17, 2003
Catania, Meeting ST - CMS
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
25
Strip leakage current
10
-6
Leakage Current [A]
10
-7
10
-8
10
-9
10
-4
10
dw
-5
10
-6
Leakage Current [A]
30211223296114
30211223296121
30211223296122
30211223296123
30211223296124
30211223972807
30211223972812
30211223972816
30211223972822
-5
10
i
f
uf
-7
10
ek
dx
QM
g
-8
10
-9
10
ni
NJ
nj
NP
uk
rj
pn
NK
151
558
430
374
np
NL
NQ
UI
UL
sd
EU
GZ
RJ
NM OX
uh
152
hl X
KJ
j AB
ug
owPN
et
sc
UB
NVON
XF
il261
HA 252
WZ
ds
264
wt
XE
111
265
NG
NN
dv eu
NW
OMPD
pm qp RKSD
hb hy248
JD
notv
UC
FB
375
262
dq 154
cdm
209
NE
ha
66bycj
lqmc ND
UJ
253
Z
259
bD
gz
jxkm
163
fb
278
155
pc
qr
pqsruw
av
255
260
aw
dm
156
zae
bh
xac
y
aa
ab
ad
92
137
ag
ah
am
ai
ak
aj
an
al
dc
dn
dl
NUokox
ao
ap
ar
be
bm
TJ ub
aq
as
au
at
ax
ay
az
ba
bb
bd
bk
XD
bc
bg
bf
bi
bj
bq
91
dr
bn
bl
bo
bp
bs
br
bu
bt
bw
bv
bx
bz
159
ca
cb
cd
ce
cg
cf
ch
ci
ck
cn
cl
co
cp
cr
ct
du
my
cc
cm
cq
cs
cu
cw
cv
cx
cy
da
cz
db
dd
dg
df
di
dj
do
dp
dt
de
dh
dk
67
266
NI
ABG
68
157
ko
79
149
251
nd
247
NF
UK
dy
MY
250
85
mz
479
aat
AI
vr
158
kh
kn
Yaf
jb
kf
503
730
gn
NX
OY
77
NO
210
gm
hs
zb
71
ib
ly
nz
pp
aam
aak
aan
aap
aaq
aar
aau
162
263
414
tq
xd
xm
xn
xo
xx
xz
ya
yc
yd
yi
yn
yl
yo
yp
yq
ys
yu
yt
yw
yv
yx
yy
yz
za
zc
zg
zf
zi
zk
zn
zo
zs
zr
zu
zt
zw
zv
zx
aac
zy
aad
aae
aag
aaf
aah
aai
aaj
aal
aao
aas
aaw
aav
aax
aay
aaz
aba
abb
abc
abd
abe
abg
abf
abh
abi
aci
160
gj
257
nc
ne
vl
wg
wf
wh
wm
wi
wj
wn
wq
wr
wu
ww
wx
wy
wz
xa
xb
xe
xg
xf
xh
xi
xk
xj
xl
xp
xq
xs
xr
xu
xt
xw
xv
xy
yb
ye
yg
yf
yh
ym
yk
yj
yr
YY
zd
ze
zh
zm
zj
zl
zp
zq
aaa
aab
zz
abm
abk
abj
abn
abl
abo
abp
abq
abs
abr
abu
abt
abv
abx
aby
abz
aca
acc
acd
ace
acg
ack
acj
MAA
207
hx
hz
mg
si
ue
ui
ul
us
uv
ux
vc
ve
vf
vh
vi
vk
vn
vo
vp
vq
vs
vu
vt
vw
vv
vx
vy
wa
vz
wb
wc
wd
we
wk
wl
wo
wp
ws
wv
xc
abw
acb
acf
ach
acm
acn
acl
84
93
164
nx
oh
oo
sx
tftjtTR
to
itp
lTV
ttv
tw
ua
ty
ttz
ud
um
uj
un
uo
up
uq
ur
uu
ut
uw
uy
uz
va
vb
vd
vg
vm
vj
XC
211
ic
LZ
mi
ph
sg
sk
sn
so
sq
su
st
sw
sy
sz
ta
tb
tc
td
te
tg
tTI
th
tm
tk
n
ts
tu
uc
124
HV
jjv
tjy
qi
qw
rm
rRQ
rn
rp
irq
rs
rr
ru
rt
rw
rv
rx
sb
se
sf
sh
sm
sj
sl
sp
ss
sr
sv
tTX
rtx
dz
ea
eb
ec
ed
148
161
gl
no
oi
pr
pu
pv
pz
qg
qn
qo
qu
qz
rb
rd
rg
rf
rh
rk
rl
ro
ry
sa
rz
112
eg
ef
eh
ei
fh
fz
ho
i249
fik
ju
381
ns
oe
og
of
oj
op
ot
ov
oy
pd
pe
pg
pf
pi
pj
pl
po
pq
ps
pt
pw
px
py
qa
qb
qc
qd
qe
qf
qh
qm
qk
qj
ql
qq
qs
qt
qv
qy
ra
rc
re
94
96
ee
em
ek
ej
en
el
eo
ep
es
fg
ga
gp
kb
kd
kj
nk
nn
nl
nq
nr
nu
nt
nw
nv
oa
ob
oc
od
om
on
ol
oq
os
or
ou
oz
pa
pb
pk
qx
eq
er
ew
ev
ex
ey
ez
fa
fd
fe
ff
gc
ge
gg
go
hg
hm
hp
iijiio
kc
ke
kg
ki
KN
ks
mk
mp
mr
mu
mw
mv
na
ng
nf
nh
nm
ny
G
125
fc
ffjffo
fk
fm
177
ifp
fq
n
lfs
fr
fu
ftfx
fw
fy
gd
gk
hl
ih
ka
lw
lz
me
mf
mm
mj
mn
mo
mq
ms
mt
mx
nb
PC
fv
gb
gh
gi
gq
he
hq
hv
id
is
jz
kk
kp
kr
lb
lo
lp
n
lrlu
llv
ma
mb
ltmd
x
mh
ml
70
gf
gs
gu
gt
gw
gv
gx
gy
hd
hh
hj
hn
hr
hu
ht
ia
ie
iq
iiv
iw
tiy
iz
ja
jc
jd
jo
jp
jq
ljs
kl
ku
kt
kv
kx
ky
kz
lc
ld
le
lg
llm
lh
flk
lljliLR
lls
146
gr
hf
hi
hk
hw
ig
im
ip
n
i
iu
r
i
x
je
jg
j
jh
jm
f
j
jk
jj
j
i
n
jw
kq
kw
la
TB
704
ACN
145
258
j
r
OQ
MC
SI
ACG
ACL
76
178
188
MZ
UU
AAG
ABD
ABY
ACK
ACM
I
WO
ABH
ABO
ACD
ACF
ACH
ACJ
150
170
JC
SJ
UT
VC
VT
XA
AAC
ABB
ABC
ABM
ABR
ABS
ABT
ABU
ABV
ABZ
ACA
ACB
ACC
ACE
ACI
88
NT
431
553
XR
YF
YS
682
ZZ
AAF
AAN
AAU
AAW
AAV
AAZ
ABA
ABK
ABJ
ABN
ABQ
ABW
ABX
59
NS
VQ
WD
WG
WH
WX
WY
XJ
XI
XM
XN
XV
XX
YL
YW
ZK
ZW
AAA
AAB
AAE
AAK
AAI
AAL
AAP
AAS
AAT
AAX
AAY
ABE
ABF
ABI
ABL
ABP
90
165
hc
MQ
504
505
SR
VK
VM
VW
WB
WC
WK
WJ
WI
WN
WQ
WR
WS
WT
WU
WW
XB
XG
XH
XK
XL
XO
XP
XQ
XS
XU
XT
XW
XY
XZ
YB
YC
YD
YG
YH
YK
YJ
YI
YM
YN
YO
YP
YQ
YR
YU
YV
YX
YZ
ZB
ZC
ZD
ZF
ZH
ZJ
ZI
ZM
ZL
ZN
ZO
ZP
ZQ
ZR
ZS
ZT
ZU
ZX
AAD
ZY
AAH
AAJ
AAM
713
AAO
AAQ
AAR
78
97
RD
RR
TK
UY
VF
VH
VI
VO
VP
VR
VS
VU
VX
WA
VY
VZ
WE
WF
WM
WL
WP
WV
YA
YE
YT
ZA
ZE
ZG
ZV
726
89
169
171
PO
QG
TM
TZ
UE
UN
UP
UR
UV
VB
VD
VE
VG
VJ
VL
VN
VV
126
QR
QV
RO
SN
SQ
SX
TD
TG
TH
TN
TW
TY
UA
UM
UO
UQ
UW
UX
UZ
VA
662
698
768
69
208
MP
QP
QS
RV
SB
SL
SO
SU
ST
SV
TL
TO
TQ
TS
TT
UD
UG
UF
UH
US
687
766
767
PT
QT
QY
RI
RN
SE
SG
SF
SH
SP
SS
SW
SY
SZ
TA
TE
TF
TP
TU
720
739
741
748
752
757
758
759
760
761
763
764
765
4
L
168
OH
OO
OW
PB
PL
QL
RG
RP
TC
663
705
718
719
721
722
723
727
729
731
732
733
734
735
736
737
738
740
742
743
744
745
746
747
749
750
751
753
754
755
756
762
C
127
OC
OL
OP
PG
PM
PS
PW
QD
QH
QK
QI
QQ
RA
RB
RL
RU
RT
RX
RY
SC
664
673
675
677
678
679
681
683
685
686
690
694
696
701
702
703
707
708
709
710
711
712
714
715
717
724
725
728
E
80
KX
OI
PI
PQ
PX
QB
QC
QJ
QN
QO
QW
QX
QZ
RC
RE
RM
RS
SK
549
595
602
605
608
612
614
616
619
622
623
624
625
630
631
633
636
637
638
640
641
642
643
644
646
647
648
649
650
651
652
653
655
656
657
658
659
660
661
665
666
667
668
669
670
671
672
674
676
680
684
688
689
691
692
693
695
697
699
700
706
716
F
65
95
NR
OZ
421
PH
PK
PP
PR
PU
PV
PY
PZ
QE
QF
QU
RF
RH
RW
571
580
587
588
590
592
594
596
599
600
601
603
604
606
607
609
610
611
615
617
618
620
621
626
627
628
629
632
634
635
639
645
654
H
289
MF
MH
OD
OE
OR
PA
420
QA
564
574
575
577
578
579
582
583
584
585
586
589
591
593
597
598
613
212
NH
384
OA
NZ
OK
OS
OU
OV
PE
429
559
562
563
565
566
568
569
570
572
573
576
581
K
50
147
176
HR
MT
MW
MX
NB
NY
OG
OF
OJ
PJ
RZ
542
544
546
547
550
551
552
554
555
556
557
560
561
567
BJN
LL
MG
MJ
MI
ML
MO
NC
OB
OT
PF
SA
527
529
531
533
534
535
536
537
538
539
540
541
543
545
548
KU
LS
LV
LX
MK
MM
MN
MR
MS
MU
MV
NA
426
512
514
516
518
519
520
521
522
523
524
525
526
528
530
532
O
R
S
185
LK
LJ
LM
LN
ME
396
506
507
509
511
513
515
517
P
Q
V
179
HH
HX
HY
IQ
JT
KH
KP
KT
KV
LD
LH
LT
LU
MB
343
MD
364
402
489
490
491
492
494
495
496
497
498
499
501
502
508
SM
510
T
U
187
JV
JY
KC
KF
KI
KS
KY
LC
LE
LG
LF
LI
LP
LW
478
481
482
486
487
488
493
500
W
AC
AD
46
73
FC
174
IU
JA
JG
JO
JP
JU
KD
KE
KK
KM
KQ
KR
KZ
LA
LB
LO
LQ
LY
403
471
473
475
476
477
480
483
484
485
HT
ID
IG
IW
IZ
JJ
JN
JR
JX
KL
KO
KW
370
432
454
460
461
463
465
466
467
468
469
470
472
474
AE
AG
AF
BC
ES
FN
FO
GF
HQ
IE
IF
IO
JB
JE
JF
JL
JQ
JS
JW
KA
KB
371
447
448
453
455
456
457
458
459
462
464
AH
AK
AJ
AM
AL
AN
AP
AR
AS
AT
AV
AX
BD
72
DE
113
EB
EJ
ET
FK
FX
GD
GG
GJ
GL
HB
HC
HK
HL
HO
HP
HS
IA
IC
IK
IJ
IIM
IL
IN
IIP
IR
IS
IT
IV
267
JH
JK
JI
JM
JZ
KG
433
437
441
443
444
445
446
449
450
451
452
AO
AQ
AU
AW
AY
AZ
BB
BE
BG
58
CW
DC
DH
DK
DJ
DQ
DS
DZ
ED
EE
EH
EK
FH
FM
FU
FW
FV
GA
FZ
GB
191
GN
GS
GX
213
HF
HJ
HM
230
HU
HW
HZ
IB
IH
IIY
X
MA
382
425
434
435
436
438
439
440
442
BA
BF
BH
BK
BJ
BI
BM
BL
BN
BO
BS
CC
CK
CU
CT
CV
CX
CZ
DA
DB
DG
DF
DL
DN
DP
DR
DT
DW
DV
DX
DY
EC
136
EG
EF
EI
EO
EQ
EV
EX
FF
FJ
FI
FL
FP
FQ
FS
FY
GH
GK
GI
GM
GO
GP
GR
GU
GT
GV
HD
HG
HN
412
415
416
418
419
422
423
424
427
428
BP
BQ
BR
BU
BT
BW
BV
BX
BY
BZ
CB
CD
82
CG
CL
CR
CS
CY
DD
DI
DM
DO
DU
EA
EM
EL
EP
EW
EY
EZ
FA
FD
FE
FG
173
FR
FT
GE
GW
GY
HE
HI
408
410
411
413
417
53
75
CA
CE
CF
CH
CJ
CI
CM
CN
CO
CP
CQ
138
EN
183
GC
341
404
409
ER
399
401
405
406
407
194
GQ
385
390
391
395
397
398
400
153
166
203
380
383
386
388
389
392
393
394
63
83
189
372
373
376
377
378
379
387
86
356
359
360
361
362
363
365
366
367
368
369
52
184
254
256
342
345
353
354
355
357
330
333
335
338
344
346
347
348
349
350
351
352
358
49
114
139
175
195
245
297
311
322
327
328
329
331
332
334
337
339
340
141
199
206
292
315
316
317
320
321
323
324
325
336
23510
62
128
172
288
290
304
305
308
309
310
312
313
319
326
142
198
201
202
243
282
291
298
299
300
301
302
303
314
318
611
813
914
17
51
116
119
182
197
283
286
287
293
294
295
296
306
307
712
16
18
19
20
21
22
23
32
135
181
241
272
276
280
281
284
285
15
24
26
27
28
29
30
33
34
35
36
40
45
47
56
74
81
110
115
131
196
200
242
244
268
269
270
271
274
275
277
279
25
31
37
38
39
41
42
44
48
57
121
186
190
240
246
273
43
54
55
61
64
87
122
123
130
180
224
225
231
232
233
234
235
236
238
60
98
132
144
167
204
205
214
215
216
217
219
222
223
226
227
228
229
237
239
100
102
107
109
129
140
193
218
220
221
101
99
103
104
105
106
108
117
118
120
133
134
143
192
-10
10
1
A
-11
a
10
-10
30211023185001
30211023185002
30211023185005
30211023185009
30211023185010
30211023185017
30211023185022
30211023752801
30211023752802
30211023752805
30211023752806
30211023752810
30211023752813
30211023752814
30211023752817
30211023752818
30211023752821
30211023752822
30211023752823
-12
10
0
100
200
300
400
500
10
0
100
200
strip number
March 17, 2003
Catania, Meeting ST - CMS
300
400
500
600
700
strip number
CMS Sensor Quality
Frank Hartmann – University of Karlsruhe
26