Transcript Slide 1

Diamond Detectors Ltd
Diamond Detectors Ltd
Diamond Detectors
Introduction to DDL
Facilities / Investments
Markets / Applications Partnerships / Projects
DDL Proprietary Contact Technology
Alex Brown Sales & Marketing
18 July, 2015
Diamond Detectors Limited
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Diamond Detectors Ltd
Diamond Detectors Ltd
Diamond Detectors
Introduction to DDL
Facilities / Investments
Markets / Applications Partnerships / Projects
DDL Proprietary Contact Technology
Alex Brown Sales & Marketing
18 July, 2015
Diamond Detectors Limited
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Introduction to DDL
June 2007, DDL Moves into new office, Poole, Dorset
Diamond Detectors Ltd
Diamond Detectors Ltd
Press release Thursday 3rd May 2007
“Element Six Spins Out New Company to Develop Diamond Detectors…….
2008, BAE systems acquires 50% share in DDL
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Diamond Detectors Limited
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Diamond Detectors Ltd
Diamond Detectors Ltd
Diamond Detectors
Introduction to DDL
Facilities / Investments
Markets / Applications Partnerships / Projects
DDL Proprietary Contact Technology
Alex Brown Sales & Marketing
18 July, 2015
Diamond Detectors Limited
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Facilities / Investments
Expertise
Facilities
Diamond Lab
Laser Lab
Chemistry Lab
Lithography and Assembly Clean
rooms. (class 1000 & 10000)
Design Suite
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Material Processing
Lapping & Polishing Processes
Laser Dicing & Shaping
Metallization (e.g. Ti, Pt, Au, Al..)
Neutron Scintillation Coating 6LiF
Lithography (sandwich,strips,pixels)
Die Fabrication and Test
Die/Wire Bonding.
Packaging
Characterisation.
Electronics Development
Diamond Detectors Limited
Diamond Detectors Ltd
Diamond Detectors Ltd
“From Concept through Design & Prototype to Manufacture”
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Facilities / Investments
Concept - Design
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Diamond Detectors Ltd
Diamond Detectors Ltd
“From Concept through Design & Prototype to Manufacture”
Manufactured Devices
Diamond Detectors Limited
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Aluminium & Gold wedge and
ball wire bonding
Dage 4000 Wire bond pull tester
Metallisation
Lapping, Polishing and Semi-automatic scaife
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Universal wedge bonder (K&S
4523)
Optical Profiler NT9100
Semi Automatic Scaife
Laser cutting, dicing & sputtering system
Sputtering & E-Beam
Evaporation & Milling
Quazer Laser Dicing
Magnetron Sputtering
Device Fabrication
Diamond Detectors Ltd
Diamond Detectors Ltd
“From Concept through Design & Prototype to Manufacture”
Wire Bonding (Strip Detector)
Diamond Detectors Limited
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ball bonding (K&S 4124)
Facilities / Investments
Facilities / Investments
Characterisation
Diamond Detectors Ltd
Diamond Detectors Ltd
“From Concept through Design & Prototype to Manufacture”
Typical process specifications :Polycrystalline standard polish Ra < 20nm
Polycrystalline detector polish Ra < 12nm
Polycrystalline Super polish
Ra < 5nm
Single crystal detector polish Ra < 1nm
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Facilities / Investments
2009 update
Licensed CAT-5 site (Sr-90 37MBq)
Alpha, Beta, Gamma and X-ray sources
Dicing technique permits two 100
micron plates from single crystal
Scaifing specialist improves single
crystal polishing – polishing lines
removed
Laser Shaping, Dicing & Vacuum
sputtering (including ion beam
polishing) teething problems
(equipment failures) resolved
New Jigs & Fixtures
2010 plans
Q1, automated ccd measurement
capability
Yield improvement on 50 and 100 micron
plates enables standard pricing
Batch production of standard products
Teething issues with new equipment
resolved – increases rate of development
1 micron lithography tools under
evaluation
(or 120k budgeted for spray coater)
Develop techniques to hold diamond
during scaife
2009 - under-resourced, equipment issues (largely
addressed), yield issues, significant investments, increase
in capabilities
2010 – yield improvements, significant investments,
standard products, increase in capabilities
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Diamond Detectors Ltd
Diamond Detectors Ltd
Manufacturing 2009 update / 2010 plans
Diamond Detectors Limited
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Facilities / Investments
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Intrinsic single crystal
Diamond Detectors Limited
Diamond Detectors Ltd
Diamond Detectors Ltd
Intrinsic Polycrystalline
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Diamond Detectors Ltd
Diamond Detectors Ltd
Diamond Detectors
Introduction to DDL
Facilities / Investments
Markets / Applications Partnerships / Projects
DDL Proprietary Contact Technology
Alex Brown Sales & Marketing
18 July, 2015
Diamond Detectors Limited
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Diamond Detectors Ltd
Diamond Detectors focus includes...
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Diamond Wide Band Gap Detectors. (solid state
ionizing chamber)
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Diamond Sensors (Electro-chemical and Bio
applications)
Diamond Detectors Ltd
High Tech Application of Diamond
HEP
Applications for CVD Diamond
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Neutron & α detection
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Radiotherapy, particles and x-ray
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Beam monitoring & diagnostics
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Precision tracking (inner layer) LHC / SLHC
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TOF
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Energy resolution
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Beam positioning
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Heavy ion
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Diamond Detectors Limited
Diamond Detectors Ltd
Diamond Detectors Ltd
Radiation detectors employed in beam lines and other applications
with synchrotrons, colliders and cyclotrons. Also used in satellite and
stellar instrumentation
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DDL’s CVD Diamond detectors with CAEN electronic solutions:
N1470
HV
Power
Supply
Source 210Po
Waveform
Digitizer
Running DPP
Trapezoidal shaping
Diamond
detector
USB 2.0
In
Out
A422A
Preamplifier
In
DT5724
Digitizer
Trig/Gate
N1470
4 Channel
Programmable
NIM HV
Power Supply
DT5724
4 Channel 14 bit
100 MS/s Digitizer
A422A
Charge Sensitive
Preamplifier
Diamond Detectors Ltd
Diamond Detectors Ltd
Electronic Instrumentation for
DDL’s CVD Diamond Detector
Medical
Intensity Modulated
Radiation Therapy
Focussed Photon
Beam Profile
Before treatment of patient:
Diamond Detectors Ltd
Diamond Detectors Ltd
Example Application of
EL SC CVD Diamond:
• Dummy run with detector
• Detector placed in tissue equivalent
material to assess beam profile
• Detector must be moved several times
to collect enough information
- an array of detectors would be ideal
Courtesy of Scanditronix
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Treatment:
• Patient typically receives 3 treatments,
each from a different angle of entry
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Nuclear Applications
Applications for CVD Diamond
α / β in air
α spectroscopy
α / β contamination
Neutron
X-Ray
Solid State Ion Chamber
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Diamond Detectors Limited
Diamond Detectors Ltd
Diamond Detectors Ltd
X-ray, Alpha, Beta, Gamma and Neutron radiation detectors for dose /
spectroscopy applications in nuclear power and reprocessing plants
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Oil & Gas
Solid State /Ionizing Chamber
& Electrode / Electro-Chemical properties
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High temperature operation (>>300C, negligible dark current pA
scale)
Extremely low leakage or background currents.
High electron and hole motilities (fast operation in counting modes)
High break down.
High thermal conductivity
Radiation hard.
Solar blind (response to deep UV, soft and hard x-rays, particles and
neutrons)
Tissue equivalent dose measurement (low Z =6)
Spectroscopic measurements (with single crystal)
Chemical inertness.
Wide electro-chemical window
Bio-compatible (non-fouling)
Mechanical hardness
Diamond Detectors Limited
Diamond Detectors Ltd
Diamond Detectors Ltd
Polycrystalline & Single-Crystal Solid-State Ionizing Chambers
Diamond with its wide band gap (5.47ev) and resilient properties makes it an ideal choice for
applications working in hostile environments. As a wide band gap semi-conductor the material can
operate at elevated temperature and in high pressure, high vibration environments
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Projects
Diamond Detectors Ltd
Diamond Detectors Ltd
 Mike Bentley, York University , (Fair beamline
Instrumentation)
 Richard Hugtenburg, Swansea University, (Medical
Dosimeters)
 Prof. Peter Winlove, Exeter University, (Knowledge Transfer
Program for diamond based bio/chemical sensors)
 Japp Velthuis, Bristol University, (RD42 member) Case
Studentship for GHz fast counting applications in Civil
Nuclear and Particle Therapy
 Darren Caruana, UCL, BDD electrodes for pollen
identification and counting
 Various industrial partners across the DDL markets
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Diamond Detectors Limited
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Diamond Detectors Ltd
Diamond Detectors Ltd
Diamond Detectors
Introduction to DDL
Facilities / Investments
Markets / Applications Partnerships / Projects
DDL Proprietary Contact Technology
Alex Brown Sales & Marketing
18 July, 2015
Diamond Detectors Limited
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DDL Proprietary Contact Technology
(Electrical Contact Fabrication on CVD Diamond)
Diamond Detectors Ltd
Diamond Detectors Ltd
Metallization
Diamond Detectors Limited (DDL) has patented an innovative metallization technique to maximize CVD diamond
performance. Here we seek to highlight the issues and describe the solution.
The development of CVD Diamond has made possible many new applications for detecting and sensing. However,
manufacturing semiconductor devices in diamond present some interesting challenges due to diamond’s unique
characteristics. Traditional or inadequate contact fabrication may result in poor mechanical adhesion, polarization
effects and unrepeatable results.
Mechanical Adhesion
Specifically, the mechanical adhesion of the metal chosen as electrode on the diamond surface. A flatter smoother surface
presents fewer adhesion points. When a metal is thermally evaporated on diamond it may not adhere and it could peel off
after a short period of time with the consequent deterioration of the electrical signal measured and therefore a decrease in
the lifetime of the device. Mechanical adhesion is a function of the diamond / contact interface.
Polarization Effects
Polarization phenomena occur when electric currents pass through diamond if the electrical contact is not able to extract and
inject electrons fast enough. In this case, the neutrality of the crystal after the passage of ionizing nuclear radiations is not
restored in the time interval between two consecutive events. As a result, charge accumulation occurs within the crystal and
immobile carriers establish an electric field which acts in a direction opposite to the applied field produced by the external
bias voltage V. The minimisation of polarization effects requires optimal injecting contacts.
Repeatable Results
If a device is to be commercially viable it should be consistent and stable in a variety of environmental conditions. Requires
stable and resilient contacts.
Historically, there have been three main approaches to fabricate good electrical contacts on diamond:
1. Damaging the diamond surface in order to disrupt the sp3 bonding.
2. Using carbide forming metals like titanium or chromium to create a hybrid metal-diamond interface material .
3. Doping of diamond during growth or using ion implantation.
For example, to prepare good injecting contacts, several metals were used by Kozlov et al., for hole injection they used Ag,
Au, Pt or C deposition, aluminium or boron implantation, for electron injection P, Li or C.
Galbiati et al. IEEE TNS VOL 56 N 4 AUGUST 2009 p1863
DDL Proprietary Contact Technology
(Electrical Contact Fabrication on CVD Diamond)
Galbiati et al. IEEE TNS VOL 56 N 4 AUGUST 2009 p1863
Diamond Detectors Ltd
Diamond Detectors Ltd
Metallization
DDL Proprietary Contact Technology
(Electrical Contact Fabrication on CVD Diamond)
Diamond Detectors Ltd
Diamond Detectors Ltd
Metallization
DDLs solution
To address the polarization issues mentioned above and to provide a method for forming an ohmic electrode that is also
durable and stable for applications in diamond radiation detectors and diamond electronics, Diamond Detectors Ltd have
developed and tested an innovative electrical contact using a very thin diamond like carbon layer. Diamond-like carbon (DLC)
is a form of amorphous carbon between diamond and graphite, containing significant portion of sp3 bonded atoms in the
matrix. DLC films can be grown when carbon is deposited under energetic (~10-100eV) bombardment, where the
instantaneous local high temperature and pressure induce a proportion of carbon atoms to bond as diamond. The conditions
for DLC deposition are obtained during a variety of methods, including CVD, laser ablation, magnetron sputtering, cathodic
arc, and ion beam deposition.
This innovative contact consists of a very thin (1-3 nm) diamond-like carbon film which is formed on a diamond substrate by
means of Argon magnetron sputtering from a carbon target. The very thin DLC layer allows for the injection of both holes and
electrons in the diamond substrate. Also, the DLC layer becomes a seed for the sputter deposition of high work function
noble metals (Pt, Au) which allow metals to cohere to the diamond surface. As platinum and gold have a higher work function
than diamond this permits electrons present at the diamond surface to be driven towards the noble metals via quantum
mechanical tunnelling through the thin DLC layer acting as a quantum mechanical tunnelling junction.
DDL’s patented metallization technique provides a manufacturable, high adherence diamond / contact interface with
minimal polarization effect while maximizing stability and contact resilience.
Galbiati et al. IEEE TNS VOL 56 N 4 AUGUST 2009 p1863
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DDL Proprietary Contact Technology
Galbiati et al. IEEE TNS VOL 56 N 4 AUGUST 2009 p1863
Diamond Detectors Ltd
Diamond Detectors Ltd
Dark Current Characteristics
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Diamond Detectors Ltd
Diamond Detectors Ltd
REFERENCES:
Bergonzo et al., Diamond and Related Materials, Volume 10, Issues 3-7, March-July (2001),
631-638
J.H. Kaneko et al. / Nuclear Instruments and Methods in Physics Research A 505 (2003) 187–190
Pomorski et al., Phys. Stat. Sol. (a) 202, No. 11 (2005)
Gianluca Verona-Rinati “Single crystal CVD diamond neutron detectors in a p-type/intrinsic/metal layered
structure” , http://www-norhdia.gsi.de/talks/4th/G_Verona-Rinati.pdf
Galbiati et al. “Performance of Monocrystalline Diamond Radiation Detectors Fabricated Using TiW, Cr/Au
and a Novel Ohmic DLC/Pt/Au Electrical Contact” IEEE TNS VOL 56 N 4 AUGUST 2009 p1863
Angelone et al.: “NEUTRON DETECTORS BASED UPON ARTIFICIAL SINGLE CRYSTAL DIAMOND”
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, VOL. 56, NO. 4, AUGUST 2009 pp.2275-2279
Almaviva et al.: “Thermal and fast neutron detection in chemical vapor deposition
single-crystal diamond detectors” J. Appl. Phys. 103, 054501 2008
G.J. Schmid et al. “A neutron sensor based on single crystal CVD diamond”,
Nuclear Instruments and Methods in Physics Research A 527 (2004) 554–561
M. Pillon, M. Angelone, A.V. Krasilnikov, Nucl. Instr. and Meth. Phys. Res. B 101 (1995) 473.
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Diamond Detectors Limited
Diamond Detectors Ltd
Diamond Detectors Ltd
Thank you
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Diamond Detectors Ltd
Diamond Detectors Ltd
Collaborating Opportunities ?
 Custom design and prototype manufacture.
Let us help you develop a resilient detector/sensor
technology for your application using our design
tools, facilities and experience in collaboration with
your R&D team.
 Prototype to Product (cost engineering, batch
processing and test)
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Wide electrochemical window
Extremely low background current.
Bio-Compatible (non-fouling)
Very stable surface (Chemically inert)
Varied surface terminations possible
Mechanically robust
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Diamond Detectors Ltd
Diamond Detectors Ltd
Application Diamond Sensors
Bio-and Chemical Sensing
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Application Diamond Sensors
•PH-Sensors
•Temperature-Sensors
•Conductivity
•Replacement of Mercury Electrodes (Mercury ban widens)
Diamond Detectors Ltd
Diamond Detectors Ltd
•Electro-chemical sensors (MEA, trace element analysis)
(Mining, Automotive, Medical, Food, Water, Environmental,
Emissions …..)
Next Generation (addressable MEA)
under consideration
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