Transcript ACTFEL ITO Etch Mask Design/OU NanoLab

Assembling Your EL Lamp
This presentation will take you through the steps
to assemble your electroluminescent lamp.
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Cleaning the ITO
Application of the phosphor layer
Application of the dielectric layer
Application of the back electrode
Testing the completed display
The Luxprint Electroluminescent Inks were
donated by DuPont. (www.mcm.dupont.com)
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Overview of the EL Lamp
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ITO (green)
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etched electrode isolation bar.
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Conductive rear electrode layer
connects to electrode bar (left)
does not extend to image border (right)
does not extend to edges of slide (top & bottom)
phosphor (cyan)
phosphor layer extends to edge
of the isolation bar (left)
to image border (right)
to edges of slide (top & bottom)
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conductive rear electrode (gray)
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Copper tape electrodes (brown)
copper tape connects
to the left (rear) electrode bar and
to the right (front) electrode bar.
dielectric (magenta)
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dielectric layer
nearly covers the isolation bar (left)
extends to image border (right)
to edges of slide (top & bottom)
The layer thicknesses are
greatly exaggerated!
Cleaning the ITO
First set up the basic mask pattern
Set up PowerPoint for drawing
from the draw menu select ‘Grid & Guides’
• check ‘snap objects to grid’
• select grid spacing of 0.063” (1/16”)
• check ‘Display grid on screen’
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Add the bar to separate the front and back electrodes.
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Define the area
Use the rectangle tool to draw a 1” square.
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Using the rectangle tool
make a rectangle taller than 1” and one grid unit wide.
use the paint bucket tool to set the fill to white.
Make the fill black
Select the square and
use the ‘paint bucket’
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We actually want the bar thinner.
Select the bar and then right click.
From the pop-up menu select ‘format auto shape’
select the ‘size’ tab and adjust the width to 0.03”
(You will need to type this.)
Designing Your Etch Mask
(steps 5-8)
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Position the bar
select the bar and move it 2 grid spaces from the left.
The right edge of the bar should be 2 grid spaces from the left.
The leading edge of the object snaps to the grid, so the result
depends on the direction you are moving.
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Completing the basic pattern
Select the left bar
set the line color (outline) to ‘no line’
Select the right bar,
set its fill color to black
Group all three objects
select all three objects, right click,
from the pop-up menu, select grouping,
select group.
2 grid spaces (1/8”)
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We also need to reserve space for the front electrode.
Our design must fit in between.
Duplicate the bar and position
the duplicate 2 grid spaces form the right.
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The area for your pattern.
Now you have the basic pattern created.
You can now add patterns between the left and right bars.
For aesthetic reasons you will want to leave a margin
of at least one grid unit around your pattern.
Area for your pattern
If the two bars do not appear to have the same width,
This could be an artifact of the display. Zoom the display,
at higher magnification they should appear equal.
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2 grid spaces (1/8”)
Designing Your Etch Mask
(steps 9-12)
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Create a temporary guide
It is useful to make a rectangle to define the pattern area.
Add a rectangle to define your pattern area, shown in
blue. Your will delete this later.
11
Fixing isolated areas.
The pattern we want, enclose regions
of ITO which are not connected to the
front electrode contact.
We can easily fix this by drawing black lines
between the outside and the inside.
Use several lines to insure connection.
Some may fail.
Use lines at least 1-1/2 pts wide.
What I have done is
easier to see here
10
Draw your pattern inside the rectangle.
Make sure it is black & white. No gray.
Remember the mask will define where
acid will remove ITO
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12
Finalizing your pattern
When you are satisfied with your pattern
erase the guide rectangle from step 9.
Group all of the objects. This helps prevent parts of your
mask from accidentally shifting.
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Designing Your Etch Mask
(steps 13-16)
Final check
Make sure the bar separating the front and the back
electrode is clear. No part of your pattern should cross it.
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Are any parts of your pattern isolated? If so go to step 11.
Because your pattern is only 1” square, you can put many
on one sheet. It is a good idea to copy our mask
pattern several times so that you have extra.
Test print you mask on paper
You will use a laser printer to generate your mask
by printing onto transparency film.
Because transparency film does not grow on trees
we will first make a test print on paper.
It is best to perform the test print on the SAME printer
you will use for the transparency.
PowerPoint wants to print white lines as black.
To print what you see,
go to ‘print’ from the ‘file’ menu,
at the lower left under ‘print what’ select ‘color’
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Print your mask on transparency film.
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Inspect you Finished Mask
If you find defects in the black image
use a Sharpie marker to cover the
unwanted clear areas.
When you are sissified with your mask
your are ready for the photolithography.
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Sample Mask Sheet
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