Transcript semicon用プレゼンテーション

Introduction of Cryogenic
Division
１．Company profile
２．History of Cryogenic Division
３．Contents of Business
４．Major Customer
５．Sales Office & Sales Area
６．Features of Cryopump
７．Sales results
SUZUKI SHOKAN CO.,LTD
１．Company profile
SUZUKI SHOKAN CO.,LTD
１．History of Cryogenic Division
＊1971 Entered Cryogenic Business
Technology Institute of former JR(Japan Rail Road) started
basic experiment of liner motor train.
Started sales and maintenance business of Helium Liquefier.
Installation of Helium Liquefier and Helium Storage Tank for
experimental liner motor train in Miyazaki.
→ Currently supply the same system to experimental liner
motor train in Yamanashi.
SUZUKI SHOKAN CO.,LTD
１． History of Cryogenic Division
＊1979 Entered Cryopump market
＊1983 Established joint venture company JECC with
CVI in U.S.
＊1986 Maintenance facility is completed
＊1988 Started production of Torr-kun
＊1993 Entering to the business related to the superconductivity
＊1997 Established joint venture company JECC TORISHA with
Nippon Sanso
＊1999 Change the Cryopump name from Torr-kun to
SPACETORR
SUZUKI SHOKAN CO.,LTD
２．Contents of Business
１．Sales and Maintenance of Cryopump
２．Production and Sales of Helium Refrigerator
appliances
OZONE JET SUPPLIER
CRYOSTAT with GM REFRIGERATOR
３．Sales of L-He container
Distributor of L-He Container（CRYOFAB INC. in U.S.)
４．Sales & Production of Superconductivity magnet
５．Sales of the products of JECC TORISHA
VACUUM INSULATION PIPING
LN2 CONTAINER
６．Sales of Products for R & D field
BAREBR-NICHOLS INC.
AMERICAN SUPER CONDUCTER
SUZUKI SHOKAN CO.,LTD
３．Major Customers
＊Semiconductor Manufacturer
１）Transistor
２）Memory
３）System LSI
４）Logic
＊Liquid Crystal
＊Electronic Component（Magnetic head, DVD, CD, MD etc.）
＊Optics
＊Device Manufcturer for the above referenced process
Ion Implanter,Sputtering Machine,Evaporation Machine,etc.
SUZUKI SHOKAN CO.,LTD
４．Sales Office & Sales Area
●Office Location
Sendai, Kawagoe, Osaka
●Domestic Distributor
Asahi Seiki Co., Ltd.
●Overseas Distributor
MASS-VAC.,Inc.(USA)
Feedback Technology Corp. (Taiwan)
Seongwoo Instruments, Inc. (Korea)
AES Technology International (Shanghai)
High-Tec Vacuum Service (Malaysia､Singapole)
SUZUKI SHOKAN CO.,LTD
Features of Cryopump
SUZUKI SHOKAN CO.,LTD
What’s the advantages of Cryopump
compared with diffusion pump?
●
Water pumping speed improves drastically.
●
A vacuum chamber inside is hardly contaminated.
●
The counter flow of the oil never occurs.
●
●
L-N2 is not required for the operation.
The vacuum cold trap chiller, such as a Polycold is
not required.
SUZUKI SHOKAN CO.,LTD
Features of Cryopump
１．Standarization of Low Vibration
Performance
● Vibration effect to the carriage part and L/L
were decreased.
→ Dropping or deviation of the wafer can be
prevented.
●16,000Hr recommendation maintenance period
→ Runing cost is much lower in comarison with the
the other maker’s cryopump.
SUZUKI SHOKAN CO.,LTD
Features of Cryopump
１． Low Vibration Performance
CTI
Suzuki Shokan
SUZUKI SHOKAN CO.,LTD
Low Vibration Performance
２. Panel for fast rate exhaust and
enhanced capacity for hydrogen gas
● 3 times of exhaust gas capacity (In-house comparison)
→ Long interval period and stabilized exhaust performance
SUZUKI SHOKAN CO.,LTD
CRYO ＣＯＮＴＲＯＬＬＥＲ
SELCON-S
SUZUKI SHOKAN CO.,LTD
What’s ＳＥＬＣＯＮ－Ｓ？
Controller for the purpose to shorten
the regeneration time.
●Cooldown time can be shortened by applying
of the inverter.
●Time for temperature rising can be shortened
by built-in heater.
SUZUKI SHOKAN CO.,LTD
Regeneration time 1/3
SELCON-S Installation record(Multiple drive C305）
Other company 8"
120
Other company 12"
100
140
A200F-AS3NE
78
A300-AS3NE
17
0
100
25
61
50
120
150
75
55
100
150
Warm Up
200
Rough
250
Cooldown
SUZUKI SHOKAN CO.,LTD
300
350
400
Comparison for regeneration time
for A200(8inch)
Regene
SELCON-S
For
A200
A200AS3NE
start
Other
for
６MIN
Raise
company
8inch
６０MIN
temperature
３０MIN
６０MIN
ROR
３０MIN
１５MIN
Cooldown
SELCON-S
Total Time
５０MIN
１２０MIN
１０１MIN
Other
company
Total time
２７０MIN
Regene
finish
SUZUKI SHOKAN CO.,LTD
What’s the basic concept of
SELCON-S？
●Curtailment of regeneration time
●Easy operation
●Down sizing & Light weight
●Evolution of regeneration box
SUZUKI SHOKAN CO.,LTD
Shorten of the regeneration time
SUZUKI SHOKAN CO.,LTD
Easy Operation
●Operation Method
Compressor can be easily operated by the turning of
the power switch.
●Maintenance
It is easier to maintain our cryopump as compare
with the cryopump equipped by controller. Our
cryopump does not require the detaching of the
controller, when maintenance.
Easy maintenance, Less failure damage.
SUZUKI SHOKAN CO.,LTD
Saving down time benefits you 90 hours of
process operation time in one year
350
312
300
250
200
180
156
150
102
100
50
90
51
0
3週間（年17回）
2週間（年30回）
SELCON-S（再生時間3Hr）
1週間（年52回）
他社ﾎﾟﾝﾌﾟ（再生時間6Hr）
SUZUKI SHOKAN CO.,LTD
Specification
●Weight: ７ｋｇ
●Power Supply: AC200V Single Phase 50/60Hz
below 5A
●Applicable model
〇Cryopump
Low vibration cryopump with built in heater
〇Compressor Unit
All the models
SUZUKI SHOKAN CO.,LTD
Features of Compressor Unit
SUZUKI SHOKAN CO.,LTD
Features of Compressor Unit
１．Designed only for the Helium
refrigerant, and consistent production
●Ideal heat exchange in compression
→ Failure or damage of the discharge valve is improved
drastically.
A unique cooling system is adopted. This system
removing the heat effectively caused by Helium
compression.
●SANYO ELECTRIC’s superior refrigeration technology is applied.
→ Cooling water is not required for heat exchange.
(Other maker’s compressor requires cooling water.)
SUZUKI SHOKAN CO.,LTD
Features of Compressor Unit
2. The world maximum class of Helium
discharging capacity
●The world maximum class of displacement as
a rotary compressor.
→ Flow rate capacity of Helium is 20%～30% larger in
compare to other maker’s compressor.
SUZUKI SHOKAN CO.,LTD
Features of Compressor Unit
2. The world maximum class of Helium
discharging capacity.
SUZUKI SHOKAN CO.,LTD
Features of Compressor Unit
3. Stable products quality by mass production
of factory.
● An annual production of the factory: 3.5million sets
→ Other maker has to be supplied compressor unit
from air-conditioning maker.
SUZUKI SHOKAN CO.,LTD
C100G Compressor unit
SUZUKI SHOKAN CO.,LTD
Specification for C100G
Not to change Adsorber！
Running cost is very low！
Maintenance free！
C300G have started to sell from this Sep.
C200G will start to sell in near future.
SUZUKI SHOKAN CO.,LTD
Countermeasures of
Energy Saving
SUZUKI SHOKAN CO.,LTD
Countermeasures of
Energy Saving
Aiming at accomplishment of 50% energy saving by
March 2004 in compare with former model.
●Exhaust performance of Ar and H2 does not fall.
●Regeneration time is shortened by built in heater.
●Further evolving of multiple drive
SUZUKI SHOKAN CO.,LTD
Countermeasures of
Energy Saving
Illustration of the multiple operation which the cryopump system of the new
development was used for .
SUZUKI SHOKAN CO.,LTD
Sales Results
Standard cryopump of equipment maker
Ion Implantor：Sumitomo Eaton Nova（Semiconductor）
Mitsui Engineering Ship(Poly-Si TFT)
Sputtering：Tokki（OELD）
Optional cryopump of equipment maker
Ion Implantor：Nissin Ion(Semiconductor）
Varian Semiconductor Eqipment（only E series）
Others
Ion Implantor：AMAT,ULVAC(Semiconductor）
Sputtering：Hitachi,Sincron,Shinko Seiki,Shibaura
（TMR）
SUZUKI SHOKAN CO.,LTD
Sales Amount
SPACETORR SALES AMOUNT
1200
1000
（Unit）
800
600
400
200
0
92年
93年
94年
95年
96年
Sales Amount
97年
Export
98年
99年
SELCON-S
SUZUKI SHOKAN CO.,LTD
00年
01年
02年