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Nanoelectronic Memory Devices: Space-Time-Energy Trade-offs Ralph Cavin and Victor Zhirnov Semiconductor Research Corporation 1 Main Points Many candidates for beyond-CMOS nano-electronics have been proposed for memory, but no clear successor has been identified. Methodology for system-level analysis How is maximum performance related to device physics? SRC/NSF A*STAR Forum on 2020 Semiconductor Memory Strategies: Processes, Devices, and Architectures, Singapore, October 20-21, 2009 http://grc.src.org/member/event/e003676/e003676_MeetingResults.asp 2 Space-Time-Energy Metrics Essential parameters of the memory element are: cell size/density, retention time, access time/speed operating voltage/energy. None of known memory technologies, perform well across all of these parameters At the most basic level, for all memory elements, there is interdependence between operational voltage, the speed of operation and the retention time. Cell dimensions are also part of the trade-off, hence the Space-Time-Energy compromise 3 Space-Action Principle for Memory Energy timeVolume min E t V min E t L min E t Nat min The Least Action principle is a fundamental principle in Physics E t min (h) Plank’s constant h=6.62x10-34 Js 4 Three essential components of a Memory Device: 1) ‘Storage node’ 2) ‘Sensor’ which reads the state e.g. transistor 3) ‘Selector’ which allows a memory cell in an array to be addressed physics of memory operation transistor diode All three components impact scaling limits for all memory devices 5 Three Major Memory State Variables Electron Charge (‘moving electrons’) Electron Spin (‘moving spins’) e.g. DRAM, Flash (STT-) MRAM Massive particle(s) (‘moving atoms’) e.g. ReRAM, PCM, Nanomechanical, etc. Note: Electrical I/O always wanted 6 DRAM schematic Problem 1: In Si devices Ebmax<Eg=1.1 eV Barrier+Selector p Storage: n N carriers n Eb, eV Max. retention 0.6 0.65 0.75 1.1 1.6 1 ms 4 ms 84ms ~1 h >10 years Only volatile memory possible with FET barrier 7 Volatile electron-based memory: DRAM Selector Eb,C dC Sensor Eb,tr a 25fF Storage Node (a=10 nm, K=100) Nel~105 Cint 88 fF 0 ~ L 1cm Vcap=10-15 cm3 Problem 2a: External sensing requires large Nel Problem 2b: Large Nel requires large size of storage node (capacitor) Problem 2c: Series resistance of the storage capacitor increases with scaling 8 Charge-based injection “easy” in DRAM: Barrierless transport… Write K=100 a~10 nm CV tw RC RFET Rcap C I Dominates at a<10 nm (>25fF) tw~0.1-1 ns 9 DRAM summary Ta=1 s Ta=10y Ew~10-14 J Ew~310-14 J a=15 nm a=30 nm Volcap~5105 nm3 Volcap~106 nm3 VolFET=104 nm3 VolFET=105 nm3 EtV~10-9 J-ns-nm3 EtV~10-8 J-ns-nm3 DRAM inherent issues: Selector Sensor -Low barrier height-Volatility - Remote sensing – Large size of Storage node 10 Flash in the limits of scaling Storage Node Volstorage=2000 nm3 Nel~10 ~10 nm Sensor Selector ~6nm Nel~10 ~20nm VolFET~3a3 ~3000nm3 11 Voltage-Time Dilemma For an arbitrary electron-charge based memory element, there is interdependence between operational voltage, the speed of operation and the retention time. Specifically, the nonvolatile electron-based memory, suffers from the “barrier” issue: High barriers needed for long retention do not allow fast charge injection It is difficult (impossible?) to match their speed and voltages to logic 12 Flash Summary E~10-16 J t~1 ms=1000 ns Volstorage=2000 nm3 VolFET~3a3 ~3000nm3 EtV~10-9 J-ns-nm3 The minimum space-action metric is approximately the same as for the DRAM 13 Conclusion on ultimate chargebased memories All charge-based memories suffer from the “barrier” issue: High barriers needed for long retention do not allow fast charge injection It is difficult (impossible?) to match their speed and voltages to logic Voltage-Time Dilemma Non-charge-based NVMs? The Choice of Information Carrier 14 Spin torque transfer MRAM (Moving spins): Energy Limit Eb KV f 0 exp f tr f 0 exp k T k T B B (f0~109-1010 c-1) t store KV 1 exp f0 k T B tstore>10 y the anisotropy constant of a material Eb = KV > ~1.4 eV volume D. Weller and A. Moser, “Thermal Effect Limits in Ultrahigh-Density Magnetic Recording”, IEEE Trans. Magn. 36 (1999) 4423 15 FET selector is biggest component of STTMRAM in the limits of scaling Eb = KV >1.4eV K~0.1-1 J/cm3 (the anisotropy constant of a material) volume J-G. Zhu, Proc. IEEE 96 (2008) 1786 11 nm Selecting FET VolFET~3a3 ~3000nm3 Storage Node V=1500 nm3 Nspin~105 16 STT-RAM summary V=1500 nm3 (e.g. 11nm22 nm) VolFET~3a3 ~3000nm3 Ew~Nspin Eb~105 10-19~10-14 J (Alternative estimate based on optimistic write current/write time projections: Iw~107 A/cm2 and tw~1 ns Ew~107 A/cm2 11nm2 1V 1 ns~10-14 J EtV~10-11-10-10 J-ns-nm3 This looks a little better than the electron-based we looked at earlier! 17 Scaled ReRAM (courtesy Dr. In YOO/Samsung) 18 Ultimate ReRAM: 1-atom gap 1 3 a ~ n Au 0.257 nm ON/OFF~1.61 A B V=0.5 V Eb=0.38 eV dt=0.075 nm dt<<a Ultimate ReRAM: 2-atom gap 1 3 a ~ 2n Au 0.514 nm ON/OFF~476 A B V=0.5 V Eb=2.63 eV dt=0.37 nm dt<a Ultimate Atomic Relay: 4-atom gap 1 3 a ~ 3n Au ~ 1nm Eb (energy barrier for diffusion) Energy 0.5-1 eV Eb Eb m l0 ttr t0 exp exp ~ 2s k BT k BT k BT Ultimate Atomic Relay: 4-atom gap 1 3 a ~ 4n Au ~ 1nm Eb (energy barrier for diffusion) Energy 0.5-1 eV 3 3 Eb Eb m l0 ttr t0 exp exp 10 y k BT k BT k BT (Eb=0.5 eV, n>5) Ultimate ReRAM: A summary a 1nm V=1nm3 Nat~100 (64) E~Nat*1eV~10-17J tw~1 ns (can be shown) EtV~10-17 J-ns-nm3 without FET VolFET~3a3 ~3000nm3 EtV~10-14 J-ns-nm3 with FET Summary Ncarriers Vstor, nm3 Main constraints due to sensor SpaceAction, Biggest Ew, J tw, ns J-ns-nm3 component DRAM 105 105 10-14 1 ns ~10-8-10-9 Flash 10 103 10-16 103 ns ~10-9 Sensor FET 103 10-14 1 ns ~10-10 Selector FET 10-17 ~10-14 Selector FET STT-RAM 105 ReRAM 100 1 without FET 1 ns Storage Node Constraints by sensor not considered VolFET~3000nm3 With FET 24 Summary Memory cell design is a tradeoff between physical variables needed to achieve long retention times, and short write/read times. A global metric, space-action, for all memory categories provides insights into most promising extremely-scaled memory devices based on fundamental physics Scaling Limits of semiconductor component often dominate overall scaling for the memory cell Our preliminary study suggests a good potential for ReRAM (some constraints are not considered) Today’s memory technology meets Feynman’s challenge of placing the 24 volumes of Encyclopedia Britannica (~200 MB) on the head of a pin (~.025 cm^2). Library of Congress (10 Terabytes) on 1 cm^2 by 2020? 25