Transcript Plasma Physics and Radiation Technology

The Plasma Physics and Radiation Technology master programme is
managed by three groups organizing the four main themes:
o Equilibrium and Transport in Plasmas
(Prof. M.C.M. van de Sanden)
o Elementary processes in Gasdischarges
(Prof. G.M.W. Kroesen)
o Coherence and Quantum Technology
(Prof. K.A.H. van Leeuwen)
The master track Plasma Physics and Radiation Technology
The track embraces subjects such as:
o the generation of plasma’s (including Nuclear Fusion),
o plasma-surface interaction (e.g. plasma deposition, plasma etching, etc.),
o plasma-accelerators,
o laser cooling techniques and atomic optics
o ion beam applications.
An important characteristic of the master track is the
fundamental approach of the themes as well as the research into
new applications of this broad field of research.
optional courses: each student has to choose a well-balanced
set of courses to a total of at least 33 ECTS points
(about 11 courses);
interdisciplinary project of 8 ECTS points (6 weeks);
external assignment project of 19 ECTS points (12 weeks)
usually outside TU/e;
graduation project of 60 ECTS points (1 year).
General outline of the Master programme
1st year
60 ECTS
2nd year
60 ECTS
11 optional courses
33 ECTS
Multidisciplinary project
8 ECTS
Graduation project
60 ECTS
ExternalAssignment
19 ECTS
Master track courses:
3P230
Nuclear Fusion
N.J. Lopes Cardozo
3P160
Advanced Plasma Physics
M.C.M. van de Sanden
3N260
Physics of High Temperature Plasmas
T.J. Schep
3P100
Molecular collisons
H.C.W. Beijerinck
3P140
Lasers in physical experiments
H.C.W. Beijerinck
3P190
Laser cooling: theory and experiment
E.J.D. Vredenbregt
Numerical Simulation of Plasmas
J.J.A.M. van der Mullen
Ellipsometry
G.M.W. Kroesen
Gas discharges
M. Haverlag
Kosmophyisics
J.J.A.M. van der Mullen
Introduction to Plasma Physics
R.A.H. Engeln
Plasma processing: science and applications
W.M.M. Kessels
3P220
Molecuul-oppervlak-interactie en vacuümtechniek
M.C.M. van de Sanden
3K100
Optics of charge particles
J. Botman
3K110
Physics of Particle accelerators
J. Botman
3K120
Nuclear Analysis techniques
L. van Ijzendoorn
3K140
Radio-isotopes and ionizing radiation
P. Mutsaerts
Conversion of electron energy to radiation
M. van der Wiel
3P200
3P110
The three research programmes :
Equilibrium and Transport in Plasmas (Prof. M.C.M. van de Sanden/Prof. D.C. Schram)
Expanding plasmas and molecule formation
Plasma surface interaction and atomistic simulations
Plasma synthesis of thin films, nanostructures, and devices
Nuclear Fusion (Rijnhuizen)
Elementary processes in Plasmas (Prof. G.M.W. Kroesen)
Non-equilibrium effects
Plasma modelling and Self-organisation in plasmas
Lighting, environmental applications
Biomedical Applications
Coherence and Quantum Technology (Prof. K.A.H. van Leeuwen)
Ultrahigh-gradient electron accelerator concepts
Nanostructure fabrication by laser manipulation
Atom optics/atom interferometry with ultracold atoms
Atom traps: ultracold plasmas and BEC’s
Coherence & Quantum Technology (CQT)
• Extreme states of matter: Ultra-cold & ultra-hot, plasmas & gases;
• Laser Manipulation of atoms, electrons and ions;
• Atom, electron & ion beams for femto-nano science & engineering.
Ultra-Cold Electron & Ion Beams:
• Laser cooling & trapping;
• Femtosecond (10-15 s) laser physics;
• Ultra-low temperature (0.001 - 10 kelvin)
plasmas;
• Femtosecond electron microscopy;
• Sub-nanometer ion beam drilling & milling.
Edgar Vredenbregt, Jom Luiten, Peter Mutsaers
Theory of Quantum Gases:
• Atoms trapped in an optical lattice;
• Superfluidity of ultra-cold (nano-kelvin) Fermi
and Bose gases;
• Quantum Plasmas & Beams.
Servaas Kokkelmans
Plasma Laser Wakefield Acceleration:
• Tera-watt “light bullet” laser physics;
• Extreme high-energy-density plasmas;
• Giga-electron-volt acceleration in a few cm.
Seth Brussaard
Atom beam
Nano Brush:
Standing
light wave
• Manipulation of atomic beams with light;
• Atom lithography;
• Deposition of magnetic nano-structures.
Substrate
Ton van leeuwen
EPG
• Elementary Processes in Gas Discharges
• Staff:
– Prof.dr.ir. G.M.W. Kroesen
– Prof.dr. J.J.A.M. van der Mullen
– Dr.ir. W.W. Stoffels
– Dr.ir. E.M. van Veldhuizen
– Prof.dr. U. Ebert
– Prof.dr. M. Haverlag
Elementary Processes in Gas Discharges (EPG)
• Light and photons: Efficient lamps and EUV sources
• Environmental technology: using plasmas for air / water cleaning
• Biomedical technology: sterilisation; new medical treatments
• New energy sources: hydrogen technology; dusty plasmas
Plasmas:
Heaven and earth
Plasmas in lab and industry (1)
Plasmas in lab and industry (2)
Science & Technology of
Plasma & Materials Processing
http://www.phys.tue.nl/pmp
Prof. dr.ir. Richard van de Sanden
Dr. Richard Engeln
Dr.ir. Erwin Kessels
Dr. Adriana Creatore
(8 postdocs; 15 PhD students; 8-12 BSc/MSc students; 5 technicians)
Research activities
Physics and chemistry of
plasma & materials processing
Plasma chemistry
Ion/radical densities/fluxes
Energy distribution fcts.
Plasma surface interaction
Micro- and nano-engineering
of functional materials
Plasma enhanced CVD
Dry etching
Plasma-assisted ALD
Thin films & devices
Advanced plasma and surface diagnostics
Nd:YAG
M
to pump
THG
plasma
Dye (C440)
S
W
M
PMT
BBO
220 nm
LN2
M
W
BS
M
L
H2
440 nm
W
M
to pump
PMT
NO cell
PMT
VUV
mono
M
Ellipsometry
Nonlinear surface spectroscopy
Novel surface diagnostics
(Laser) based gas phase diagnostics
Research issues: Plasma-materials processing
rf plasma
Reactive species created in gas phase
o Higher reactivity
o Process independent of substrate
o High throughput/large area
processing (e.g. solar cells)
More freedom and larger parameter space
o
o
Self-bias/Ion bombardment
o Etching of high-aspect
ratio structures:
ion/neutral synergism
o Manipulation of ion
energy distribution
function
o Novel synergistic
effects
Precursors, Material
properties
Plasma-assisted ALD
(conformal TiN diffusion
barriers, tunnel barriers)
Low temperatures
o Compatibility with
substrates/devices
o Organic and polymer
devices (encapsulation
of OLEDs)