Transcript Document

TU/e
Experimental set-up and diagnostic schemes for
voltage, current and nanoparticle density
measurements in silane radio-frequency plasma.
M. Sorokine, W.W. Stoffels, G.M.W. Kroesen
EPG
Department of Physics, Eindhoven University of Technology, P.O. Box 513,
5600 MB Eindhoven, The Netherlands
trigger
Dusty plasma
mw
Osc.
e
e
a
e
e
Laser
+
e
e
e
a
Plasma
data
e
e
e
+
e
e
e
a
mw
-
+
-
trig.
“pl. on”
e
a
-
+
Elementary Processes in Gasdischarges
e
plasma on
Shoot
trigger
PC
Microwave generator
Microwave Resonance => ne0
Photodetachment => free electrons
MW diagnostics
ne 0 
Dust & negative ions density

cavity

ne ( x ) E ( x ) 2 d x
2
cavity
E ( x) d x
GPIB
50
0
ne 0 
2fme 0 (2 f ) 2
f 0e 2
Microwave
generator
RF Generator
-50
50
25
U I
0
Laser shot
trigger
-25
-50
Sensor
-50
0
RF
Amplifier
V
W
pumping
50
TM110 mode electric field
spatial profile. No z
dependence. Only Ez is
present.
Power monitoring
400
120
Gas flow
Acquisition unit
Matching box
RF
IV sensor
Old experimental setup
200
0
0
5
10
-200
15
n, E14 m-3
Voltage, Volts
Phase, degrees
Some data from the old set-up
80
40
0
Ph[1]
Ph[2]
Ph[3]
2
4
6
8
10
Pressure, E-01 Torr
Ph[4]
5
0
0
Pressure, E-01 Torr
Ph[0]
10
U[0]
U[1]
U[2]
U[3]
Data on power input characteristics
0
5
10
Pressure, E-1 Torr
U[4]
3036900 kHz
39246000 kHz
Electron density