Transcript Slide 1

© 2006 Swagelok Company. Swagelok confidential. For internal use only.
Diaphragm Valves
for Atomic Layer Deposition
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
ALD Process: Typical System Requirements
• High-speed pulses
– Tens to hundreds of cycle per deposited layer
• Extraordinary reliability
– Millions to tens of millions of valve cycles per year
• Accurate pulse delivery
– Fast and repeatable valve actuation time
– Cycle-to-cycle flow consistency and valve-to-valve flow consistency
• Uniform heating for high-temperature chemistries
• Compatible with high temperatures and corrosive fluids
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
ALD Valve Features
• Extensive testing
and design
– More than 300 valves
– FEA
Optimized diaphragm
• Patent-pending cobalt-based super
alloy design
– Over 10 billion
test cycles
• Optimized for ALD
applications
– High cycle-life
– Accurate, consistent
flow
– Rapid repeatable
actuation
– UHP design
Seat
• High-purity PFA
• Fully-contained design
• High-temperature design
– High-temperature
capability
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
ALD Thermal Model Valve Features
• Extensive testing
and design
Electronic valve
position sensor
(optional)
– More than 300 valves
– FEA
– Over 10 billion total
test cycles
• Optimized for ALD
High-speed pneumatic
cylinder design
• < 15 ms response times
• < 5 ms opening/closing times
applications
– High cycle life
– Accurate, consistent
flow
High-temperature
actuator with thermal isolator
(optional)
– Rapid, repeatable actuation
– UHP design
– High temperature
capability
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
Swagelok ALD Valve Performance
Laboratory tests
Characteristic
Performance
Cycle Testing
> 25million cycles
Valve Actuation Capability
< 5 ms actuation time
< 15 ms response time
Consistent Flow
Less than 6 % variability
High Temperature
Up to 200°C (392° F)
For more information refer to the ALD Valve Technical Report
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
High Cycle Life
What would ultra-high cycle life mean to your UHP applications?
Reduced maintenance time?
Increased quality?
Reduced valve replacements?
Greater uptime/productivity?
Improved production consistency?
Fewer lost batches?
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
High Cycle Life
Cycles per Year
Replacement Interval Replacement Interval Replacement Interval
(» 2 million cycle valve)
( > 10 million cycle valve)
( > 25 million cycle valve)
5 million
4.8 months
2 years
5 years
10 million
2.4 months
1 years
2.5 years
30 million
24 days
4 months
10 months
100 million
7 days
1.2 months
3 months
For cycle comparison purpose only. Other features can and will affect replacement life.
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
Fast Actuation Response
Closed circuit (10 to 30 volts)
Response time
Open circuit
(0 volts)
Electronic Position Sensor Signal
Actuation
speed
Valve Open
Valve Diaphragm Position
Valve closed
Solenoid Pilot Valve Electrical Profile
Solenoid pilot fully open
Command Signal
-10
0
10
20
30
40
Time, milliseconds
70 psig (4.8 bar) actuation pressure, MAC® 34B-AAA-GDCF, 24V, 3 in. of 0.093 in. ID tubing between pilot and actuator valve
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
Fast Actuation Response
Solenoid Pilot Location
25
Response Time (ms)
1/8 X.016 in. Tubing ID
20
15
10
5
0
6
12
18
24
30
36
Tubing Length (in.)
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
Valve Fast-Pulse Response
Open
Valve Response
(diaphragm position)
Closed
Command Signal
-20
0
20
40
60
80
100
120
140
160
Time (ms)
70 psig (4.8 bar) actuation pressure, MAC 340-AAA , 24V, 3 in. of 0.093 in. ID tubing between pilot and actuator valve, 6 in. of
0.093 in ID on pilot exhaust, 2 in, tubing from pneumatic trunk
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
Repeatable Pneumatic Actuation
11 ms
"lag"
Valve Stroke Response (20)
50 ms Pulse Width
Pilot Response (20)
50 ms Command Pulse
-10
0
10
20
30
40
50
60
70
80
Time (ms)
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
Valve-to-Valve Flow Consistency
• Both ALD3 and the high flow ALD6 have
20%
Typical customer specification
Conventional Diaphragm
Valves
valve-to-valve flow variability less than
6%
Swagelok® ALD
Valves
• Minimizes variation in pulse
Less than
6%
gas delivery
• Minimizes set-up time
• Supports consistent processes
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
Thermal Management
• Significantly reduces heat transfer
°C
IR Image
With
Thermal
Isolator
Thermal
Isolation
Coupling
Without
Thermal
Isolator
Control Thermocouple
Cartridge at valve seat (200°C)
Heater
Holes
to the actuator, extending actuator
and sensor life
• Promotes uniform valve body
temperature
– Minimizes cold spots and hot spots
• Significantly reduces electrical
power required
2 x 50 W (110 V) cartridge heaters
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
ALD Valve Product Line
Multi-port and Elbow
Manifolds
Two-Port ALD3
w/Solenoid Pilot Valve
1.125 in. Modular
Surface Mount
Two-Port ALD6
Normally Closed
1.5 in. Modular
Surface Mount
Two-Port ALD6
Normally Open
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
ALD Valves
• Long valve life and high reliability
– Tested to >25 million cycles
• High valve-to-valve flow consistency
– Flow variability less than 6 %
• Rapid and high-repeatability cycling
• High-temperature capability
• Precise thermal management
• Chemical compatibility
© 2006 Swagelok Company. Swagelok confidential. For internal use only.
IGC, Swagelok, VCR —TM Swagelok Company
Elgiloy —TM Elgiloy Limited Partnership
MAC —TM MAC Valves, Inc.
© 2006 Swagelok Company. Swagelok confidential. For internal use only.