Transcript IGC II - Kylos Hosting

igc II
™
Modular Surface-mount
Design
© 2004 Swagelok Company
Features of Modular Gas Systems
• Reduces Space Requirements
• Facilitates Easy Assembly and Maintenance
• Reduces Inventory
© 2004 Swagelok Company
igc II
™
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© 2004 Swagelok Company
Simplifies Design and Assembly
Reduces Potential Leak Points
Reduces Panel Weight
Complies with SEMI-PR3.1
Supported by Local Swagelok Distributors
Competitive Cost of Ownership
Modular
Technology
1.53 in.
(38.9 mm)
© 2004 Swagelok Company
1.23 in.
(31.2 mm)
Open Architecture
Surface-mount C-ring Gaskets
Surface-mount Seals
3 port
2 port
C-ring Gasket Assembly
For Drop-down components
© 2004 Swagelok Company
1 port
igc II Construction
™
Igc Panel
© 2004 Swagelok Company
igc II Construction
™
Substrate Assemblies
© 2004 Swagelok Company
igc II Construction
™
Surface-mount
Components
© 2004 Swagelok Company
igc II Construction
™
Substrate Flow Components
Substrate
Channel
© 2004 Swagelok Company
igc II Construction
™
Substrate Assemblies
© 2004 Swagelok Company
igc II Construction
™
Igc Panel
© 2004 Swagelok Company
igc II Construction
™
Manifold Flow Components
© 2004 Swagelok Company
igc II Construction
™
Mounting Components
Base Plate
© 2004 Swagelok Company
Substrate Layer
Substrate Assembly
© 2004 Swagelok Company
Substrate Layer
Surface-mount
Components
© 2004 Swagelok Company
Substrate Flow Components
Substrate
End Connector
Drop-down
MFC
Connectors
Surface-mount
Connector
© 2004 Swagelok Company
Substrate Layer
Substrate Clip
Substrate Channel
Substrate Component
© 2004 Swagelok Company
Substrate Layer
Lock-down plate
Substrate Channel
© 2004 Swagelok Company
Substrate Layer
C-ring Gasket
Substrate Channel
© 2004 Swagelok Company
Substrate Layer
Surface-mount Component
Substrate Channel
© 2004 Swagelok Company
Substrate Layer
© 2004 Swagelok Company
Substrate Layer
Load Bearing Insert
© 2004 Swagelok Company
Manifold Layer
Manifold Clip
Manifold Component
Manifold Channel
© 2004 Swagelok Company
Manifold Layer
Manifold Assembly
© 2004 Swagelok Company
Manifold Layer
Butt Weld End
Connection
Butt Weld End
Connection
© 2004 Swagelok Company
Manifold Layer
Manifold Ports
© 2004 Swagelok Company
Manifold Layer
Manifold Plug
© 2004 Swagelok Company
Manifold Layer
Cap
© 2004 Swagelok Company
Manifold Layer
Cap Screws
Substrate Channel
Manifold Clip
Manifold Component
© 2004 Swagelok Company
Manifold Channel
Manifold Layer
Locating Rib
© 2004 Swagelok Company
Manifold Layer
Parallel Manifold
© 2004 Swagelok Company
Manifold Layer
Parallel Manifold
Jumper Component
© 2004 Swagelok Company
Support Layer
Foot Block
Mid-line Support
Block
Foot Block
© 2004 Swagelok Company
Accessories
Cartridge Style Heater Clip
© 2004 Swagelok Company
Accessories
Vertical Port
Mass Flow Controller
Conversion Plates
Cap
© 2004 Swagelok Company
igc II
™
© 2004 Swagelok Company