Transcript North America Silicon Wafer Committee Liaison Report

NA Facilities and Gases Committees
Liaison Report
Updated March 09, 2011
Gases Co-chair
Tim Volin - Parker Hannifin
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Facilities Co-chairs
Steve Lewis - CH2M Hill
Phil Naughton - Applied
Materials
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Gases Committee
C: Tim Volin – Parker Hannifin
Components SC
TBD
Mass Flow TF
Mohamed Saleem - Fujikin
John Savadkouhi – Brooks
Instrument
Pressure Measurement TF
Justin Hough - AMAT
Contamination SC
Tim Volin – Parker Hann.
Filters & Purifiers TF
Mohamed Saleem – Fujikin
Materials & Process SC
Tim Volin – Parker Hann.
Materials of
Construction Gas Delivery
Systems TF
Tim Volin – Parker Hann.
Heater Jacket TF
David Colquhoun – BriskHeat
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Facilities Committee
C: Phil Naughton – Applied Materials
C: Steve Lewis – CH2M Hill
F47 Revision TF (New)
Ken Kapur – KLA Tencor
Uwe Haller – Applied Materials
Phil Sarikas – Intel
Todd Steudtner – TI
Alex McEachern - PSL
F51 Revision TF (New)
Dalia Vernikovsky - Applied Seals
Design for Facilities TF
Al Chasey – Arizona State Univ.
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Meeting Information
• Last meeting
– Tuesday, November 9, NA Fall
• SEMI HQ, San Jose, CA
• Next meeting
– Tuesday, March 29, 2011, NA Spring Standards
Meeting
• SEMI HQ in San Jose, CA
• www.semi.org/standards for the latest update
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Ballot Results Summary
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Ballot Passed Technical Committee Review
[1]
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Doc. 5055, Reapproval of SEMI C54-1103 - Specifications and
Guidelines for Oxygen
Doc. 5056, Reapproval of SEMI C55-1104 - Specification for Liquid
Carbon Dioxide (CO2) Used in Near Critical, Critical and
Supercritical Applications, >/ 99.99% Quality
Doc. 5057, Reapproval of SEMI C56-0305 - Specifications and
Guidelines for Dichlorosilane (SiH2Cl2)
Doc. 5058, Reapproval of SEMI C57-0305 - Specifications and
Guidelines for Argon
Doc. 5059, Reapproval of SEMI C58-0305 - Specifications and
Guidelines for Hydrogen
Doc. 5060, Reapproval of SEMI C59-1104 - Specifications and
Guidelines for Nitrogen
Doc. 5061, Reapproval of SEMI C60-0305 - Specifications and
Guidelines for Nitrous Oxide (N2O)
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Ballot Passed Technical Committee Review
[2]
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Doc. 4786B, Revision of SEMI F4-1000, Specification for
Pneumatically Actuated Cylinder Valves
Doc. 5044, Revision to SEMI F32-0709 Test Method for
Determining of Flow Coefficient for High Purity Shutoff
Valves
Doc. 4788A, Revision of SEMI F78-0304 Practice For Gas
Tungsten Arc (GTA) Welding Of Fluid Distribution Systems
In Semiconductor Manufacturing Applications (failed ISC
Review)
Doc. 4789B, Revision of SEMI F81-1103 Specification for
Visual Inspection and Acceptance of Gas Tungsten Arc
(GTA) Welds in Fluid Distribution Systems in
Semiconductor Manufacturing Applications (failed ISC
Review)
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Ballot Passed Technical Committee
Review [3]
• Doc. 4722E - Revision of SEMI F70-0302, Test Method for
Determination of Particle Contribution of Gas Delivery
System (failed ISC Review)
• Doc. 4968 - Revision of SEMI E16-90 (Reapproved 1104) with
title change to Guide For Determining And Describing Mass
Flow Controller Leak Rates (failed ISC Review)
• Doc. 4969 - Revision of SEMI E18-91 (Reapproved 1104) with
title change to Guide For Temperature Specifications Of The
Mass Flow Controller
• Doc. 4970 - Revision of SEMI E27-92 (Reapproved 1104) with
title change to Terminology For The Linearity Of Mass Flow
Controllers And Mass Flow Meters (failed ISC Review)
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Ballot Failed Technical Committee Review
• Doc. 4737A, New Standard: Guide For Heater
Jacket Requirements
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Upcoming Ballots [1/3]
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Technical Ballot for Cycle 1 and 2, 2011
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Doc. 5099 - Revision of SEMI E52-0310 - Practice for Referencing Gases,
Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow
Controllers
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Doc. 5677C - Revision of SEMI E66-1103, Test Method For Determining
Particle Contribution By Mass Flow Controllers
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Doc. 4737B - New Standard: Guide For Heater Jacket Requirements
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Doc. 4788B - Revision of SEMI F78-0304 Practice For Gas Tungsten Arc
(GTA) Welding Of Fluid Distribution Systems In Semiconductor
Manufacturing Applications
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Doc. 5138 - Reapproval of SEMI F20-0706E, Specification for 316L Stainless
Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used
in General Purpose, High Purity and Ultra-High Purity Semiconductor
Manufacturing Applications
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Doc. 5142 - Reapproval of SEMI F60-0306 - Test Method for ESCA
Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L
Stainless Steel Components
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Upcoming Ballots [2/3]
• Doc. 4789C, Revision of SEMI F81-1103 Specification for Visual Inspection
and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution
Systems in Semiconductor Manufacturing Applications
• Doc. 4722F- Revision of SEMI F70-0302,Test Method for Determination of
Particle Contribution of Gas Delivery System
• Doc. 4968A - Revision of SEMI E16-90 (Reapproved 1104) with title
change to Guide For Determining And Describing Mass Flow Controller
Leak Rates
• Doc. 4970A - Revision of SEMI E27-92 (Reapproved 1104) with title
change to Terminology For The Linearity Of Mass Flow Controllers And
Mass Flow Meters
• Doc. 3383 - Reapproval of SEMI F27-0997 (Reapproved 1103) Test Method
For Moisture Interaction And Content Of Gas Distribution Systems And
Components By Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)
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Upcoming Ballots [3/3]
• Document 4652A - Revision of SEMI C3.2-0301, Specification for Arsine
(AsH3) in Cylinders, 99.94% Quality
• Document 4657B - New Standard: Specifications for Tungsten
Hexafluoride (WF6)
• Document 4734A - New Standard: Specification and Guide for Boron
Trichloride (BCl3)
• Document 5139 - Reapproval of SEMI F29-0997 (Reapproved 1103), Test
Method for Purge Efficacy of Gas Source System Panels
• Document 5140 - Reapproval of SEMI F37-0299 (Reapproved 1104),
Method for Determination of Surface Roughness Parameters for Gas
Distribution System Components
• Document 5141 - Reapproval of SEMI F38-0699 (Reapproved 1104), Test
Method for Efficiency Qualification of Point-of-Use Gas Filters
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Components Subcommittee
• Mass Flow TF/Mohamed Saleem (Fujikin)
– Balloted 5 year revisions/approvals of Mass Flow
Controller standards
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E16-90 (Reapproved 1104) MFC Leak Rates
E27-92 (Reapproved 1104) Mass Flow Meter Linearity
E66-1103 (Particle Contribution of MFC), reballot
E67-0304 (Reliability of MFC), reballot
– Drafting doc. 5099 - Revision of SEMI E52-0310 - Practice
for Referencing Gases, Gas Mixtures and Vaporizable
Materials Used in Digital Mass Flow Controllers
• Adding two additional mixed gas codes
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Components Subcommittee
• Pressure Measurement TF/Justin
Hough (Applied Materials)
– Drafting
• Doc. 3440B, New Standard:Test Method For Pressure
Transducers In Gas Delivery Systems
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Contamination Subcommittee
• Filters & Purifiers TF/Mohamed Saleem
(Fujikin)
– Balloted Doc. 4722F - Revision of SEMI F70-0302,
Test Method for Determination of Particle
Contribution of Gas Delivery System
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Materials & Processes Subc
• Materials of Construction Gas Delivery
Systems TF/ Tim Volin(Parker Hannifin)
– Balloted two documents for cycle 1-2011
• Doc. 4788B, Revision of F78-0304 Practice For Gas
Tungsten Arc (GTA) Welding Of Fluid Distribution Systems
In Semiconductor Manufacturing Applications
• Doc. 4789C, Revision of F81-1103 Specification for Visual
Inspection and Acceptance of Gas Tungsten Arc (GTA)
Welds in Fluid Distribution Systems in Semiconductor
Manufacturing Applications
– Future work includes a new document for welding
and joining processes currently not addressed by
SEMI Standards
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Materials & Processes Subc
• Heater Jacket TF/David Colquhoun
(BriskHeat)
– Demand for higher performance jacketing heater
systems in the semiconductor is needed
• Consistent ways of specifying jacket is required
– Doc. 4737A - New Standard: Guide For Heated
Systems Requirements
• Failed and returned to TF for rework
• The document was balloted in cycle 2-11
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Facilities Committee
• SEMI F47 Revision Task Force/Alex
McEachern (PSL)
– F47 is up for 5 year review.
– F47 requires that tools be immune to voltage sags
that commonly occur on AC power grids.
– Rewriting doc. 5079, Revision of SEMI F47-0706 Specification for Semiconductor Processing
Equipment Voltage SAG Immunity
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Facilities Committee [2]
• SEMI F51 Revision Task Force/Dalia
Vernikovsky (Applied Seals NA)
– F51 is up for 5 year review
– Drafting doc. 5080, Revision of SEMI F51-0200 Guide for Elastometric Sealing Technology
• A review of possibilities to ‘assign’ a code of possible
levels of acceptance of what o-rings can be suited for (
a rating system ) was proposed
• Meeting monthly
• End user is encouraged to participate
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Contact
• For more information, please contact
– Kevin Nguyen at [email protected]
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