Transcript 구매제안서 - 曝光機、塗佈機、光罩

HIGH SPEED PL MAPING SYSTEM
Model : MAPLE-X208
M&R Nano Technology Co., Ltd.
M&R
Add.: No. 726, JhongShan S. Rd., YanMei, TaoYuan, 326, Taiwan
TEL : 886-3-4852036
FAX : 886-3-4852512
Email : [email protected]
Web-site : http://opto-equipment.etrading.com.tw/
1.Company Information
A. Company Introduction
B. Executive Summary
C. Management Principles
D. Company History
E. Company Details
F. Organizational Structure
2. Principles of Photoluminescence
3. Photoluminescence Measurement
4. Introduction to Maple-X 208
5. Comparison
6. Scalability
7. Service Plan
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1-A. Company Introduction
DongWoo Optron is a technology company specialized in the field of spectroscopy.
DongWoo Optron was initially established as “DongWoo Trading” in 1989 mainly focusing on
introducing high quality, high precision optical instruments to South Korean market. However, 9 years
relentless research and development drove DongWoo to produce its first Monochromator(s) in its own
manufacturing plant in 1998. As destined in its due course DongWoo Trading renamed to “DongWoo
Optron Co., Ltd.” and naturally putting all its efforts in R&D and producing high quality, high precision
spectroscopy instruments. Today DongWoo has built up its reputation world wide as a high-end
spectroscopy system manufacturing company.
We are committed to build state-of-art optical products that customers really need. Making a perfect
product takes two way communication. We will always listen to our customers’ voice whether the
needs are for high-tech R&D or for high precision nano-scale production lines. Creating solutions that
are tailored to best suit your developments and production requirements is our mission.
We are certain that whatever your needs are DongWoo will provide just the solution where you need it
the most.
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1-B. Executive Summary
Dear valuable customers,
DongWoo has strived in the field of spectroscopy to develop and supply
best, high quality instruments to our loyal customers consistently
supporting DongWoo Optron past 20 years. Thanks to our loyal
customers DongWoo Optron has consolidated its position as a high-end
spectroscopy instrument manufacturing company world wide today.
Many people often state that nothing much has changed past 40 years in
the spectroscopy industry. But it is quite the opposite. Science and
technology progresses with the time. So has the spectroscopy
instruments. DongWoo Optron is always tuned to our customer’s
wavelength to introduce products that are most up-to-dated.
Complacence is a word that does not exist in our dictionary. Earnest and
hard workings scientists and engineers are making relentless efforts to
produce products that are recognized by our customers.
Taking this opportunity Dongwoo Optron would like to thank all its
loyal customers and new customers.
C.E. O
M&R
Richard Lin
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1-C. Management Principles
DongWoo was founded upon the following three principles;
1.Earnest Hard Work
2.Eagerness for New Challenges
3.Expectation for the Best
To become the Dongwoo Optron today there was one big secret behind our
success and it is the Earnest Hard Work. If we were afraid of new
challenges, we would have never achieved the goals we set out the first
day. Regardless it is a rainy day or a bright sunny day Dongwoo Optron
always prepared for tomorrow Expecting the Best. If we ever stopped what
we did in the past and what we do today, we would have never achieved
the things we have today. With Earnest Hard Work, Eagerness for New
Changes, and the Expectation founded upon diligence, Dongwoo Optron
will become the leading company in the field of spectroscopy.
All these fancy words and principles will be forgotten unless we constantly
remind ourselves where we were and what we wanted to achieve in the
first day like we often do with the first love.
C.E. O
Richard Lin
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1-D. Company History
 Oct/01/1989: Established DongWoo Trading & Mfg
 Feb/1998: Setup YongIn manufacturing plant & Optical System R&D Lab
 June/1998: First Monochromator development commenced
 Sep/1998: Joint OTDR development with KERI (2 Years)
 Nov/1998: Joint development of CCD Camera with Korea Astronomy Observatory
 Mar/1999: Company reformed to “DongWoo Optron” Limited Company
 July/1999: First Spectrometer developed (sold over 230 units domestic and
worldwide)
 Apr/16/2001: Moved into DongWoo headquarter building - present
 June/2006: Nominated for “Future Export” award
 Sep/2006: Awarded “Industry & Energy” prize from the Ministry of Commerce
 Nov/2006: Awarded “President Prize” for excellence in technology
 Nov/2006: Acquired “Info-Biz” certificate from SMBC
 Jan/2007: “Environmental Detection System” and “LIBD” development
commenced
 July/2008: Environment Detection and LIBS systems launched
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1-E. Company Details
Company Details
President: Mr. Richard Lin
Capital: US$700K
Turnover (2008): US$10M
Principle Place of Business:
611-5 Maesan-Ri, Opo-Eup,
GwangJu-Si, GyungGi-Do,
South Korea (464-893)
Total Employees: 48 persons
URL: http://www.dwoptron.com
M&R Nano Technology Co., Ltd.
Tuned to your wavelength
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1-F. Organizational Structure
Organization
President
Management
Planning
HR
Accounting
Marketing & Sales
Import &
Export
Domestic
Procurement
Laser & Stage
Systems
Domestic
Logistics
R&D
Overseas
System
Mechanical
Electronics
Software
Optical &
Bio-Vision
Systems
Overseas
Logistics
Production
Quality
Control
/ Assurance
Stock Control
Production
Planning &
Management
Total Number of Employees: 48 persons
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2. Principles of Photoluminescence
Photoluminescence (abbreviated as PL) is a process in which a substance absorbs photons (electromagnetic radiation) and then re-radiates
photons. Quantum mechanically, this can be described as an excitation to a higher energy state and then a return to a lower energy state
accompanied by the emission of a photon. This is one of many forms of luminescence (light emission) and is distinguished by photoexcitation
(excitation by photons). The period between absorption and emission is typically extremely short, in the order of 10 nanoseconds. Under special
circumstances, however, this period can be extended into minutes or hours. which a photon of a particular wavelength is absorbed and an
equivalent photon is immediately emitted. This process involves no significant internal energy transitions of the chemical substrate between
absorption and emission and is extremely fast, of the order of 10 nanoseconds. Testing or measurement of Photoluminescence can be performed
non-descructive and comparatively fast. It is useful in determining composition, contaminants, and chemical-electrical characteristics of a
substance under test.
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3. Photoluminescence Measurement
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Photoluminescence measurement is a most appropriate method in determining
Epi-Wafer doping/coating quality just after MOCVD process in Epi-Wafer
production line.
Maple-X 208 allows to rapidly check the quality of Epi-Wafers produced in the
production line lot by lot providing all necessary lot based statistic data, and
ultimately enables mangers to monitor and optimize MOCVD process effectively.
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4. Introduction to Maple-X 208
Features
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Fully Automated with a Robot Arm
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Fastest PL mapping speed
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Saleable Wafer Size: 2~8 inch
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Safety Cautious Design
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User-friendly Software and Support
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Fully CE Complied & Certified
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4. Introduction to Maple-X 208
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Wafer size : 2, 4, 6, 8 inch available
266, 325, 375, 405nm Laser Available
Inside two excitation source & out side additional excitation source
available
Mapping step resolution : 1.0/2.0/4.0 mm
Mapping speed : <30min / 2 inch 24 cassette 2mm step resolution
Real time laser power control and monitor
Wafer auto loading & unloading by transport robot
Thin film thickness measurement by white light source
Thickness resolution : 0.25nm
Wavelength range : 200~1100nm
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4. Introduction to Maple-X 208
Excitation
Laser
PL Signal
Shutter
Sample
Stage
Aligner
Wafer
Transfer
Robot
Cassette
Loader
Rotary
Vacuum
Unit
X-Stage
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Wafer holding stage
Cassette
Unloader
Auto loader & aligner
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4. Introduction to Maple-X 208
Software for PL Mapping Data
S/W Features
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Peak Lambda, Peak Intensity, FHHM
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Integrated Signal
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Coating thickness measurement
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Easy recipe control
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Support of recipe file and recipe editor
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Support of Susceptor viewer
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Line Profile and Histogram
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4. Introduction to Maple-X 208
Fully control MOCVD Process
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4. Introduction to Maple-X 208
Quality control and report
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4. Introduction to Maple-X 208
 2 Wafer cassette loader
 Up to 48ea wafer 2~8 inch
Wafer Loading Robot
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5. Comparison
Speed
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6. Scalability
Automation
 Wafer lot number auto identification
 Wafer Magazine designed for Mass product
 Scanning cassette
Speed
 2” 25ea 2mm resolution < 15min
Software
 Self test & diagnostic
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7. Service Plan
Description
Expected Action
Response Time
1. technical service by Domestic technical engineer
2. Visit to customer site within 24 hours after receipt of service call from Korea.
A/S Plan
Stated service
- Every 6 months: stated system checked
based on a system checking list
- Every 12months: precision stated
system checked based on a checking list
Remarks
- Maintenance parts control service (actual expense)
- Software upgrade free of charge
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Emergency service
- Emergency defect troubleshoot request:
visit to customer site within 24hours
- Replacement/repair and calibration within
a minute
- Operator and Engineer’s vacancy:
operation training for new person
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Thank you very much for your attention!
M&R