Transcript IMEKO2006,TC3,RoundTable

IMEKO 2006, TC3, Round Table
Future Force Standard Machines
from Newton to Piconewton
at PTB
Jens Illemann
with contributions from
Uwe Brand, Lutz Doering and Vladimir Nesterov
IMEKO 2006 TC3, Round Table, Jens Illemann
Future Force Standard Machines at PTB
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Principle of traceable reactio force generation
F
gravity field
proposed for
feasibility / accuracy
100 MN
100 kN
deadweight FSM
100 N
small
magnetic field 1 N
electric field
light pressure force
for 1W
G  m2/kg2
IMEKO 2006 TC3, Round Table, Jens Illemann
10 mN
100 µN
6 nN
electromagnetic
balances
electrostatic
balances
existing
facilities
Mechanics
Division
Precision
Engineering
Division
of
67 pN
Future Force Standard Machines at PTB
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Demands on small force measurement
robustness
transportability
Transfer
Standards
Force
Standard
Machine
linearity
long-term stability
air / vacuum?
working direction
rejection of
parasitic components
coupling
temporal resolution?
to kg
traceability
to electrical
units
IMEKO 2006 TC3, Round Table, Jens Illemann
Future Force Standard Machines at PTB
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Research project: 10N / 2N prototype FSM
M
linear stage
piezo, 100µm
turntable
force transducer
optional: spring
ball bearing
planned 2007:
complete adjustable
face up setup
IMEKO 2006 TC3, Round Table, Jens Illemann
elm. comp.
balance
Future Force Standard Machines at PTB
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2N Prototype FSM
Contributions to uncertainty budget
Stability of balance:
zero better 2 µN
at ± 20 mK/h thermal drift
hysteresis better 3.5 µN
after 2 hours 1.5 N load
Linearity of balance:
better 2 µN over full range
manufacturers data
(to be tested by autocalibration)
deviation from setpoint / mg
Tracing back to g, kg:
better 10-6 relative: 2 µN
setpoint: 1µN,
....
1N ,
2N
0,2
90 s
0,1
0,0
1 N
-0,1
a220805
-0,2
300
400
500
600
2600
2700
2800
2900
time / seconds
1,0
balance signal in mg
Stabilization:
better 1 µN against 100 N/m
better 50 µN against 30 kN/m
1.5 N
0,8
0,6
3.5 N
0,4
a270306
0,2
0
50
100
150
200
250
300
time / min
IMEKO 2006 TC3, Round Table, Jens Illemann
Future Force Standard Machines at PTB
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2N Prototype FSM
Exemplary measurement, conform with ISO 376
Further contributions to uncertainty:
alignment of axes, run-out of axes, parasitic components and momentum
1N
1,0
150
0,4
0,2
0,0
a310806
0
20
40
60
time / min
force transducer:
type HBM U1A 10 N
with DMP 40 amplifier
used on 10% of full range
button side down
100
100 µN
0,6
non-linearity in N
force in N
0,8
50
0
-50
-100
-150
0,0
0,2
0,4
0,8
1,0
force in N
reference characteristic:
0,199856 mV/V @ 1 N
details and discussion
in the
poster
Future Force Standard
Machines
at PTBsession
IMEKO 2006 TC3, Round Table, Jens Illemann
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Lutz Doering
Uwe Brand
Prototype 20 mN facility
Intention: simultaneous measurement of force, displacement and stiffness
picomotors
properties of balance:
resolution: 1 nN
Pifoc®, 100 µm
capacitive controlled
repeatability: 2.5 nN
non-linearity: 9 nN
mount with
artifact
expected uncertainty
reachable:
probing pin
balance:
Sartorius SC2
double-walled
housing
IMEKO 2006 TC3, Round Table, Jens Illemann
20 nN in µN range
temperature drift
<< 1 mK/min
Future Force Standard Machines at PTB
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Prototype 20 mN facility
Possible force transfer standards
• multi-components
• 20 mN range
• fabricated of silicon
• piezoresistive strain gauges
• variable range 10 nN ... 1 mN
• fabricated of silicon
• piezoresistive strain gauges
contacts
piezoresistive bridge
200 µm
Si- cantilever
integrated tip
5 mm
Cooperation with:
IMT (TU Braunschweig)
Prof. S. Büttgenbach
Institut für
Halbleitertechnik
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and
Carl Zeiss, Oberkochen
IMEKO 2006 TC3, Round Table, Jens Illemann
Cooperation with IHT (TU Braunschweig)
PD Dr. Erwin Peiner
Future Force Standard Machines at PTB
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Prototype 20 mN facility
Exemplary measurement results
Linearity check:
400 µN
DM1 (without tip)
IMEKO 2006 TC3, Round Table, Jens Illemann
 1,5 µN
More contributions at this conference
Future Force Standard Machines at PTB
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Research project: nanoforce measurement device
pendulum disc
with rod
V. Nesterov
started: 2005
gold wire
DFG-Research-Project:
„Device and methods for the
measurement of micro- and
nano-forces in the range less
than 10-5 N with a resolution
of 10-12 N“
Fm  FK  K s  x
force
V. Nesterov
vacuum
chamber
laser interferometer
Facility and methods for the measurement
of micro and nano forces in the range
below 10-5 N with a resolution of 10-12 N
(development concept)
Submitted to Measurement, Science and
Technology, Proc. Nanoscale 2006, Wabern
segmented plates
IMEKO 2006 TC3, Round Table, Jens Illemann
Future Force Standard Machines at PTB
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Research project: nanoforce measurement device
September 2006:
vacuum chamber
 mechanics in work
laser interferometer
IMEKO 2006 TC3, Round Table, Jens Illemann
 seismic feedback damping
 function tested in air
pendulum disc
Future Force Standard Machines at PTB
gold wires
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Visit also in this conference:
Jens Illemann, Rolf Kumme
TC3-45 RESEARCH FOR A NATIONAL FORCE STANDARD MACHINE IN THE RANGE FROM
MICRO NEWTON TO NEWTON RELYING ON FORCE COMPENSATION
Lutz Doering, Erwin Peiner, Michael Balke, Uwe Brand
TC3-53 CALIBRATION OF LOW-FORCE STYLUS PROBES
E. Peiner, L. Doering, U. Brand, A. Christ, G. Isenberg, M. Balke:
TC13-9 FORCE CALIBRATION OF MICRO PIPETTES FOR SINGLE-CELL PROBING.
E. Peiner, A.Tibrewala, H. Lüthje, R. Bandorf, S. Biehl, L. Doering
TC13-10 PIEZORESITIVE DIAMOND-LIKE CARBON MICRO STRAIN GAUGES.
IMEKO 2006 TC3, Round Table, Jens Illemann
Future Force Standard Machines at PTB
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