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Motivation problem: global warming and climate change Contents • Introduction • Material Properties • Growth Methods for Thin Films • Development of CIGS Thin Film Solar Cells • Fabrication Technology • Conclusion & Prospect Introduction • CIS = CuInSe2 (copper indium diselenide) CIGS = CuInxGa1-xSe2 (copper indium gallium diselenide) • compound semiconductor ( I-III-VI) • heterojunction solar cells • high efficiency (≈19% in small area, ≈13% in large area modules) • very good stability in outdoor tests • applications: – – – – solar power plants power supply in aerospace decentralized power supply power supply for portable purposes Contents • Introduction • Material Properties • Phase diagram • Impurities & Defects • Growth Methods for Thin Films • Development of CIGS Thin Film Solar Cells • Fabrication Technology • Conclusion & Prospect Material Properties I • crystal structure: – tetragonal chalcopyrite structure – derived from cubic zinc blende structure – tetrahedrally coordinated • direct gap semiconductor • band gap: 1.04eV – 1.68eV • exceedingly high adsorptivity • adsorption length: >1µm • minority-carrier lifetime: several ns • electron diffusion length: few µm • electron mobility: 1000 cm2 V -1 s-1 (single crystal) CuFeS2 Material Properties II • • • • simplified version of the ternary phase diagram reduced to pseudo-binary phase diagram along the red dashed line bold black line: photovoltaic-quality material 4 relevant phases: a-, b-, d-phase and Cu2Se Hamakawa, Yoshihiro: Thin Film Solar Cells, Springer, 2004. Material Properties III • a-phase (CuInSe2): – range @RT: 24-24.5 at% – optimal range for efficient thin film solar cells: 22-24 at % possible at growth temp.: 500-550°C, @RT: phase separation into a+b • b-phase (CuIn3Se5) – built by ordered arrays of defect pairs ( VCu, InCuanti sites) • d-phase (high-temperature phase) – built by disordering Cu&In sub-lattice • Cu2Se – built from chalcopyrite structure by Cu interstitials Cui & CuIn anti sites Hamakawa, Yoshihiro: Thin Film Solar Cells, Springer, 2004. Impurities & Defects I problem: a-phase highly narrowed @RT – solution: widening a-phase region by impurities • partial replacement of In with Ga – 20-30% of In replaced – Ga/(Ga+In) 0.3 band gap adjustment • incorporation of Na – 0.1 at % Na by precursors better film morphology passivation of grain-boundaries higher p-type conductivity reduced defect concentration Hamakawa, Yoshihiro: Thin Film Solar Cells, Springer, 2004. Impurities & Defects II • doping of CIGS with native defects: – p-type: • Cu-poor material, annealed under high Se vapor pressure • dominant acceptor: VCu • problem: VSe compensating donor – n-type: • Cu-rich material, Se deficiency • dominant donor: VSe • electrical tolerance to large-off stoichiometries – nonstoichiometry accommodated in secondary phase – off-stoichiometry related defects electronically inactive Impurities & Defects III • electrically neutral nature of structural defects – Efdefect complexes < Efsingle defect formation of defect complexes out of certain defects VCu, InCu, CuIn, InCu and 2Cui, InCu no energy levels within the band gap • grain-boundaries electronically nearly inactive Contents • Introduction • Material Properties • Growth Methods for Thin Films • Coevaporation process • Sequential process • Roll to roll deposition • Development of CIGS Thin Film Solar Cells • Fabrication Technology • Conclusion & Prospect Growth Methods for Thin Films I coevaporation process: – evaporation of Cu, In, Ga and Se from elemental sources – precise control of evaporation rate by EIES & AAS or mass spectrometer – required substrate temperature between 300-550°C – inverted three stage process: • evaporation of In, Ga, Se • deposition of (In,Ga)2Se3 on substrate @ 300°C • evaporation of Cu and Se deposition at elevated T • evaporation of In, Ga, Se smoother film morphology highest efficiency Hamakawa, Yoshihiro: Thin Film Solar Cells, Springer, 2004. Growth Methods for Thin Films II sequential process: – annealing of from stacked elemental layers selenization vapor: • substrate: soda lime glass coated with Mo • deposition of Cu and In, Ga layers bysputtering sputtering films by • deposition Se layer by atmosphere evaporation selenizationofunder H2Se • rapid thermal process thermal process for conversion into CIGS advantage: large-area deposition avoidance of toxic H2(H Se 2Se) disadvantage: use of toxic gases Hamakawa, Yoshihiro: Thin Film Solar Cells, Springer, 2004. Growth Methods for Thin Films III roll to roll deposition: – substrate: polyimide/ stainless steel foil coated with Mo – ion beam supported low temperature deposition of Cu, In, Ga & Se Mo Cu,Ga,In,Se CdS ZnO advantages: low cost production method flexible modules and high power per weight ratio disadvantages: lower efficiency http://www.solarion.net/images/uebersicht_technologie.jpg Contents • Introduction • Material Properties • Growth Methods for Thin Films • Development of CIGS Thin Film Solar Cells • • • • Cross section of a CIGS thin film Buffer layer Window layer Band-gap structure • Fabrication Technology • Conclusion & Prospect Development of CIGS Solar Cells I • Zn0 front contact 0.5µm CdS buffer 50nm CIGS absorber 1.6 µm Mo back contact 1µm soda lime glass substrate 2mm www.kolloquium-erneuerbare-energien.uni-stuttgart.de/downloads/Kolloq_2006/Dimmler_EEKolloq-290606.pdf Development of CIGS Solar Cells II Buffer layer: CdS • deposited by chemical bath deposition (CBD) • layer thickness: 50 nm properties: • band gap: 2.5 eV • high specific resistance • n-type conductivity • diffusion of Cd 2+ into the CIGS-absorber (20nm) formation of CdCu- donors, decrease of recombination at CdS/CIGS interface function: • misfit reduction between CIGS and ZnO layer • protection of CIGS layer Hamakawa, Yoshihiro: Thin Film Solar Cells, Springer, 2004. Development of CIGS Solar Cells III Window layer: ZnO • band gap: 3.3 eV • bilayer high- / low-resistivity ZnO deposited by RF-sputtering / atomic layer deposition (ALD) • resistivity depending on deposition rate (RF-sputtering)/flow rate (ALD) • high-resistivity layer: - layer thickness 0.5µm - intrinsic conductivity • low-resistivity layer: - highly doped with Al (1020 cm-3) - n-type conductivity function: • transparent front contact R.Menner, M.Powalla: Transparente ZnO:Al2O3 Kontaktschichten für CIGS Dünnschichtsolarzellen Development of CIGS Solar Cells IV band gap structure: • i-ZnO inside space-charge region • discontinuities in conduction band structure –i-ZnO/CdS: 0.4eV –CdS/CIGS: - 0.4eV – 0.3eV depends on concentration of Ga • positive space-charge at CdS/CIGS • huge band discontinuities of valance-band edge electrons overcome heterojunction exclusively • heterojunction: n+ip Meyer, Thorsten: Relaxationsphänomene im elektrischen Transport von Cu(In,Ga)Se2, 1999. Contents • Introduction • Material Properties • Growth Methods for Thin Films • Development of CIGS Thin Film Solar Cells • Fabrication Technology • Cell processing • Module processing • Conclusion & Prospect Fabrication Technology I cell processing: • monolithical integration: – deposition Ni/Al of buffer layer grid substrate wash #1collector – – – – – during cell #2 processing deposition patterning of antireflection coating metal base electrode fabrication ofn-type complete modules deposition window layer patterning of #1 patterning#3 formation of p-type CIGS absorber substrate Hamakawa, Yoshihiro: Thin Film Solar Cells, Springer, 2004. Fabrication Technology II module processing: – packaging technology nearly identical to crystalline-Si solar cells tempered glass as cover glass ethylene vinyl acetate (EVA) as pottant soda-lime glass as substrate Al frame junction box with leads CIGS-based circuit Hamakawa, Yoshihiro: Thin Film Solar Cells, Springer, 2004. Contents • Introduction • Material Properties • Growth Methods for Thin Films • Development of CIGS Thin Film Solar Cells • Fabrication Technology • Conclusion & Prospect Conclusion & Prospects conclusion: prospects: • • • • • high increasing reliability utilization (solar parks, aerospace etc.) high optimization efficiencyof(≈19% fabrication in small processes area, ≈13% in large area modules) less gainconsumption in efficiency for of materials large areaand solar energy cells monolithical possible shortintegration run of indium and gallium resources high level of automation http://img.stern.de/_content/56/28/562815/solar1_500.jpg www.kolloquium-erneuerbare-energien.uni-stuttgart.de/downloads/Kolloq_2006/Dimmler_EEKolloq-290606.pdf Thank you for your attention! References: Hamakawa, Yoshihiro: Thin Film Solar Cells, Springer, 2004. Meyer, Thorsten: Relaxationsphänomene im elektrischen Transport von Cu(In,Ga)Se2, 1999. Dimmler, Bernhard: CIS-Dünnschicht-Solarzellen Vortrag, 2006.