Transcript An Overview of DARPA MEMS Program

Overview of MEMS Programs at
DARPA and Applications in
Space
William C. Tang, Ph. D.
MEMS Program Manager
Microsystems Technology Office
Defense Advanced Research Projects Agency
(703) 696-2254
[email protected]
http://www.darpa.mil/MTO/MEMS
MTO
DARPA
First Canadian Workshop on MEMS technology for aerospace applications,
the National Research Council Canada, April 12, 2001
Microsystems Technology Office
Approved for Public Release - Distribution Unlimited
DARPA Mission
Information
Systems
Information
Technology
Microsystems
Technology
Radical Innovation
in Support of
National Security
Special
Projects
Tactical
Technology
Defense
Science
Advanced
Technology
MTO
DARPA
Microsystems Technology Office
Approved for Public Release - Distribution Unlimited
[MEMS at DARPA and Space App Sent.ppt]
Slide 2
MEMS Application Domains
MEMS Exploder for Torpedoes
Shear-Stress Sensor for Jet Fighter (Caltech)
DARPA
Pico Satellites
MEMS
MEMS Sensors for Munitions
MTO
DARPA
Microsystems Technology Office
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Slide 3
Pico Satellite Potential Applications




Cooperative constellations
Sparse aperture antennas
Inspect and service missions
Extremely agile launch-on-demand, short-term,
survivable and robust communications and
surveillance space systems
MTO
DARPA
Microsystems Technology Office
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[MEMS at DARPA and Space App Sent.ppt]
Slide 4
PicoSAT Aboard Stanford OPAL Satellite
 First



demonstration:
Launched by first flight of Minotaur 26 Jan 2000 (sponsored by Air
Force and Missile System Center)
Two PICOSAT linked by 30-m-long tether jettisoned from a mother
ship, OPAL (Stanford), 7 Feb 2000
Operate MEMS RF switches in space
30-m-long tether for tracking &
communication demonstration
MTO
DARPA
Microsystems Technology Office
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Slide 5
MEMS in Pico Satellites
Pico Satellite Data Hopping Demo
Picosat 1
Picosat 2
Picosat 3
MEMS RF switch
(Rockwell)
2.5 x 7.5 x 10 cm 250 gm
MTO
Pico Satellite
(Aerospace Corp)
DARPA
Microsystems Technology Office
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Slide 6
MEMS-Replaceable Transceiver
Components
Image Reject
Filter
(Ceramic)
Ant 1
IF Filter
(Ceramic)
Ant 2
Receiver
IF Mixer
IF LNA
RF LNA
Antenna
Switch
T/R
Switch
Bandpass
Filter
(Ceramic)
I
ADC
Q
DAC
I
DAC
Q
90°
Mixer
VCO
Xstal
Tank
ADC
AGC
Channel
Select PLL
IF PLL
Off-chip
passive
elements
90°
Power Amplifier
Modulator
Transmitter
VCO
Transmit PLL
Xstal
Tank
Current Cell Phone Board
Off-chip C & L = 80% of area
MTO
DARPA
Microsystems Technology Office
Current research:
 Replace all off-chip passive elements with MEMS
resonators & filters  chip-scale integration &
improved performance
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Slide 7
92 MHz Free-Free Beam µ-Resonator

Free-free beam µ-mechanical resonator with non-intrusive
supports  reduce anchor dissipation  higher Q
MTO
DARPA
Microsystems Technology Office
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Slide 8
MEMS Actuators for Data Storage
Parallel atomic force imaging with MEMS to
exceed densities of conventional magnetic and
optical storage
MTO
DARPA
Microsystems Technology Office
Areal density: 1-100 Gb/cm2
Transfer Rates: 0.1-10 Mb/s
Size: 0.5 cm3
Power consumption:[MEMS
<1W
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Slide 9
High-Energy-Density MEMS Power
Energy Density (W-hr/Kg)
15,000
12,000
4,000
125
Honeywell Knock Engine Concept (New Start)
Resistive Start-up
Heater
Thermopiles
Q
Q
Catalyst
Q
Propane + Air
Thin insulating
membrane
Sealing Plate
MTO
MIT Thermoelectric Generator Concept (New Start)
DARPA
Microsystems Technology Office
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Slide 10
Integrated Fuel Cell and Fuel Processor
(CWRU & Battelle)

Objectives
Demonstrate a 10 milliwatt fuel processor operating with clean liquid fuels
(24 months)
 Demonstrate a 10 milliwatt fuel cell (24 months)
 Demonstrate a 50 milliwatt fuel processor operating with logistics fuels (36
months)

Current Collector
Cathode catalyst
Polymer Membrane
Glassy insulation
Alumina wafer
Fuel Manifold
laser milled gas channels
Carbon Fuel Distributor
Anode catalyst
Concept – Fuel Processor
Concept – Fuel Cell
MTO
DARPA
Microsystems Technology Office
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Slide 11
Swiss Roll Combustor (USC)
(b)
(a)
Combustion
volume
1600
1400
700
600
500
Products
1600 1200
500
400
Reactants
300 K
3-D toroidal Swiss roll
microcombustor/generator
MTO
DARPA
~ 5 mm
Microsystems Technology Office
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[MEMS at DARPA and Space App Sent.ppt]
Slide 12