Micro to Nano Technologies

By: Brent Hare Lenox laser March 30, 2004

Micro to Nano Technologies

 Micro - Prefix meaning one millionth, 1/1,000,000  Nano – Prefix meaning one billionth, 1/1,000,000,000

The Powers of 10

10 -9 10 -10 10 -11 10 -12 10 -13 10 -14 10 -15 10 -16 10 -17 10 -18 10 +0 10 -1 10 -2 10 -3 10 -4 10 -5 10 -6 10 -7 10 -8 1 Meter 10 Centimeters 1 Centimeters 1 Millimeter 100 Microns 10 Microns 1 Micron 1,000 Angstroms 100 Angstroms 1 Nanometer 1 Angstrom 10 Pico meters 1 Pico meter 100 Fermis 10 Fermis 1 Fermi 0.1 Fermis 0.01 Fermis 0.001 Fermis

Current Micro Technologies

   

Photonics

Optical Apertures and Flow Orifices

Electronics

– Semiconductor chips, anodic bonding

MEMS

– Micro Electro Mechanical Systems

Communication

interconnects – Fiber optics, switching 

Biotechnology

cell filtration, drug discovery

Current Nano Technologies

    

Molecular manufacturing

the atomic level – Precision down to

Nanotubes

– Building advanced lightweight materials as well as advancements in LCD technologies

Medicine

– Devices that will flow through the circulatory system

Nanocomposites

in material compositions – Assisting in vast improvements

Electronics

– Advanced CMOS and silicon transistor integration with lithography

Micro scaling to Nano

Click Picture to watch Nanotechnology movie mms://stream.techtv.com/windows/bigthinkers/2 002/bt020225b_165_0.asf

Micro - Optics

 Ability to drill to ½ micron for half the wavelength  Micromirrors for next generation telescope optics Micromirrors Microlens Arrays http://www.memsoptical.com/prodserv/products/ microlensar.htm

Micro - Electro

 Pentium 4  Top speed – 3.4ghz

 Built on a 0.13 micron die  168 million transistors on 200mm 2 http://www.geek.com/procspec/intel/pic2p4 13.htm

Micro - Chemical

 Miniature fuel cells  Micro channels  Chemical reactors Micro Chemical Channel Micro Fuel Cell http://www.utnl.jp/~mada-lab/research.html

50 Micron Chemical Reactor

Micro Flow Devices

3ft. X 4ft.

=

6in. x 18in.

Photos from Pittcon Swagelock has begun to minaturize its flow components

Micro - Engineering

 Micro gears  Micro embossing and stamping  Microactuators (Tiny Motors)  Micro-valves Micro embossing Complex Ratchet http://www.memx.com/image_gallery.htm

Micro-valves

Micro - Mechanical

Microactuators – tiny motors http://us.st.com/stonline/prodpres/dedicate/mem s/technolo/micro/photo.htm

Micro Mechincal

World’s smallest steam engine, the pistons are 5 microns and it actually works Micro Clutch mechanism, http://www.memx.com/image_gallery.htm

gears are 50 microns

Microfluidics

 Capillary uptake  Piezoelectric inkjets  Flow sensing  Drug dispensing  Flow based separation Print Cartridges Lab-On-Chip for DNA Detection and Analysis http://www.sensorsmag.com/articles/0700/10/m ain.shtml

Micro Canals

Micro Communications

 Full optical switching technologies  Most fiber optic backbone in the United States ranges from 1.3 to 1.5 micrometers and can transmit over 5 GBps and can span 93 miles http://www.lucent.com

Fiber optic switching

e-blox

(Scaleable, Interfaceable, Stackable)

 Micro to nano interfaces for simple solutions 

e-blox allows you to build backbones connecting Gas, Liquid, Electro, Optical – Fiber/Micro, and nanotechnologies in order to build unique devices for MEMS and other technologies

 Imagine devices built with the integration of all of these competing technologies on a Scaleable, Interfaceable, Stackable solution at the micro and nano level

MEMS (Powder Metal Die Casting for building small parts)

 The ability to arrange particles and then compress them into a die to build ultra small parts that can be used in MEMS technologies i.e. e-blox  They have the ability to create miniature tools and dies to help build MEMS technologies Micro Sensor 0.051mm

http://www.smalltimes.com/document_display.cf

m?document_id=5340

Rapid Prototyping

   Use of 3D CAD modeling with SolidEdge 3D Scanning Technologies – Use of lasers and optics to scan surface objects 3D Holography Technologies – Holograms for real visualizations http://www.solid-edge.com/ 3D CAD Model

Electroforming Technologies

Electroforming is the process of fabricating a part from the plating itself. A shaped mandrel is plated long enough to build up a "stand alone" thickness. The mandrel is then removed by melting, chemically etching or exploiting differences in thermal coefficients of expansion between the electroformed part and the mandrel. http://www.epner.com/electroforming_intro.ssi

Etching Technologies

 Wet Etching – Dissolves materials with chemicals and the use of masks  Dry Etching - ion etching (RIE), sputter etching, and vapor phase etching are used by blasting the material surface with ion gases http://www.memsnet.org/mems/beginner/etch.ht

ml

Lithography Technologies

 Lithography is a printing process where image areas and non-image areas are separated chemically  Silicon semiconductor companies use extremely small masks to mark silicon wafers with 248 nm, 193nm, and now 13.4nm wavelengths of light http://www.intel.com/research/silicon/lithography .htm

Piezeo electronics

(for micro to nano movement)

 Pizeoelectronics are materials that produce an electrical response to a mechanical force.

 Can be used in Vibration Monitoring, Imaging Arrays, Doppler Probes, Biotech, Pharmaceutical, and Industrial & Process Control

First NanoChips

 Integrated circuits can be made down to 50nm  50nm chips are made using 193nm lithography (smaller than a wavelength so they use diffraction corrections) http://www.sciam.com/article.cfm?chanID=sa00 2&articleID=000CE8C4-DC31-1055 973683414B7F0000&pageNumber=4&catID=2

Next Generation Nano Lithography

 To build chips smaller than 50nm, new lithography technologies must be created – The above technology can 2&articleID=000CE8C4-DC31-1055 973683414B7F0000&pageNumber=4&catID=2

Nano Biotechnologies

 Scientists have developed a way to use DNA for minuscule wires that can be used in nanoelectronics  Ability to have insulated wires sized at 25nm and 20 microns in length http://www.sciam.com/article.cfm?chanID=sa00 2&articleID=000CE8C4-DC31-1055 973683414B7F0000&pageNumber=4&catID=2

Nanotubes

     Conductive and high strength composites Energy storage and energy conversion devices Sensors Medical drug delivery and DNA research Nanometer-sized semiconductor devices, probes, and interconnects http://www.lbl.gov/Science Articles/Archive/images4/nanotubes-model.jpg

Nanotubes are built by arranging several atoms in a closed pattern to form an unbelievably small tube