Transcript Software Supplier Experience Implementing SEMI E116

SEMICON West 2006 STEP
Methods to Measure/Improve
Equipment Productivity
Software Supplier Experience
Implementing SEMI E116
Mark Pendleton
Asyst Technologies ®
[email protected]
Topics for Discussion
• Why Implement EPT?
• Asyst’s Rationale for Moving Forward
• Asyst’s EPT Approach
• Asyst’s EPT Implementation
– Asyst ConX300™
– Asyst Equipment Information Bridge (EIB)™
• Summary of Asyst’s Experience
July 12, 2006
SEMICON West 2006 STEP
2
Why Implement EPT?
• This is the first question we ask ourselves on
all newly released SEMI standards
–
–
–
–
What is the motivation behind the standard?
How stable is the standard?
Does it have “pull” from IC Makers (ICM)?
When can I expect orders from equipment Original
Equipment Manufacturers (OEM)?
– What is my cost to implement?
– What roadmap trade-offs need to be made?
July 12, 2006
SEMICON West 2006 STEP
3
Asyst’s Rationale for Moving Forward
• EPT discussions with key ICM and OEM
customers convinced us the need was real.
• ISMI new standards implementation surveys
confirmed EPT need.
• Level of effort to implement EPT is reasonable
when compared to 300mm standards.
• Mapping EPT to product roadmap does not
impact any strategic initiatives already planned.
July 12, 2006
SEMICON West 2006 STEP
4
Asyst’s EPT Approach
• Provide equipment OEMs and ICMs a simple,
low-risk and low-cost implementation path.
– Minimize level of effort required by equipment OEMs
to report E116 state changes.
– Minimize level of effort required by ICM Host
Applications to access E116 data.
• Add EPT to existing Asyst products, include
with standard product updates at no charge.
– Asyst ConX300
– Asyst EIB
July 12, 2006
SEMICON West 2006 STEP
5
Asyst’s EPT Approach
ICM
Host
EPT State Model
E116
E39/E120
EPT Objects
OEM
July 12, 2006
Equipment Control System
(ECS)
SEMICON West 2006 STEP
Standard Access Methods
Minimal Implementation Costs
Resilient to EPT changes
EPT Framework Isolation
Objects/Methods Localized
Quick Time to Market/Updates
Costs “to keep up” reasonable
Update impact minimal (ICM)
Update impact minimal (OEM)
Support for E116/E39
Support for E116/EDA
Standard Reporting Methods
Minimal Implementation Costs
Resilient to EPT changes
6
EPT Implementation - Asyst ConX300
• Tasks
– Provide GEM Configuration Data (GCD) file
support for EPT.
– Build EPT Objects using information from
the GCD file.
– Provide API to allow ECS to initialize EPT
objects and report EPT states.
– Provide EPT State Model to manage EPT
transition events.
July 12, 2006
SEMICON West 2006 STEP
7
EPT Implementation - Asyst ConX300
Equipment
ECS
EPT Module Handles
Configuration Data
GCD File
EPT Module States
Asyst ConX300
EPT Objects
EPT State Model
EPT Configuration Requests
EPT Status Requests
EPT Configuration Information
EPT Status/Event Reports
Host
July 12, 2006
SEMICON West 2006 STEP
8
EPT Implementation - Asyst ConX300
• EPT Objects
– EPT Objects in Asyst ConX300 are created at
equipment startup when the GCD file is processed.
– These objects are initialized and updated by the
ECS through Asyst ConX300 API calls.
– Host access to EPT objects is supported using SEMI
E39 GetAttr Service.
– Objects remain accessible to the ECS and Host until
shutdown.
July 12, 2006
SEMICON West 2006 STEP
9
EPT Implementation - Asyst ConX300
• EPT State Model
– Requires no effort by equipment OEM except
reporting changes in EPT Module states.
– Asyst ConX300 manages all EPT-required Status
Variables.
– “Freezes” values in EPT-required data variables for
each event.
– Automatically computes Equipment-Level states and
transitions based on changes in EPT Object states.
July 12, 2006
SEMICON West 2006 STEP
10
EPT Implementation - Asyst EIB
• Tasks
– Update XML Schema to define EPT Modules as
Common Equipment Model (CEM) Extensions.
– Build EPT Objects using information from the XML
Model instance.
– Equipment Control System (ECS) synchronization and
report EPT state changes using S14F1, S6F11.
– Provide EPT State Model to manage EPT transition
events.
July 12, 2006
SEMICON West 2006 STEP
11
EPT Implementation - Asyst EIB
E39ObjectManager
ApplicationRoot
«interface»
IEPTManager
1
0..1
EPT Manager
-blockedReason
-blockedReasonText
-disableEventOnTransition
-eptElementType
-eptState
-eptStateTime
-eptElementName
-previousEptState
-previousTaskName
-previousTaskType
-taskName
-taskType
-transitionTimestamp
-transition
-trackerEventId
1
*
StateMachine
1
*
EPTTracker
July 12, 2006
SEMICON West 2006 STEP
12
EPT Implementation - Asyst EIB
• EPT Objects
– EPT modules are configured within Asyst EIB as
CEM extensions to objects:
• Equipment Object may have 1 EptTracker of
EptElementType 0 (0=Equipment).
• Subsystem or Module may have 1 EptTracker of
EptElementType 1 (1=Production Module).
• Loadport or E87Loadport may have 1 EptTracker of
EptElement Type 2 (2=Loadport/EFEM).
– Mapping enforced by XML Schema File.
July 12, 2006
SEMICON West 2006 STEP
13
EPT Implementation - Asyst EIB
• EPT State Model
– Based on Asyst ConX300 implementation.
•
•
•
•
July 12, 2006
No effort required by equipment OEM.
Manages all EPT-required Status Variables.
Freezes values required in EPT data variables.
Automatically computes Equipment-Level Status.
SEMICON West 2006 STEP
14
Summary of Asyst’s Experience
• Implementation of SEMI E116/EPT was a “painfree” experience.
• Being an active participant of the EPT Task
Force was beneficial to Asyst.
• The standard and updates received were readily
understood requiring minimal clarification.
• Customer feedback positive on the ease of
implementation and quality of EPT releases.
July 12, 2006
SEMICON West 2006 STEP
15
Summary of Asyst’s Experience
• Initial implementation completed and released
in approximately 1 month with < 3 resources.
• Goal is to release updates to EPT no later
than 1Q after E116 standard is published by
SEMI.
July 12, 2006
SEMICON West 2006 STEP
16