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LPC for DIW KL-30A
7/16/2015
RION CO.,LTD
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KL-30A Features
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7/16/2015
Actual sample flow rate
20 times larger than XP-L4 (KS-17B)
Particle size range 0.05~0.2um 10CH
Color LCD, Touch panel
Built-in thermal printer
Optional CF card is available
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Measurement screen
Particle
count
indication
Particle
size display
one channel or up to ten channels on simultaneous display
7/16/2015
RION CO.,LTD
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Specifications XP-L4(KS-17B), KL30A
Minimum particle size
Sample flow rate
Counting efficiency
Actual sample flow rate
False count
Max particle
concentration
（coincidence loss 5%）
7/16/2015
XP-L4(KS-17B)
0.05um
10mL/min
1%
0.1mL/min
KL-30A
0.05um
20mL/min
10%
2mL/min
≦0.2pcs./ml
≦0.05pcs./mL
100,000pcs./mL
7,000pcs./mL
RION CO.,LTD
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Specifications KL-30A, XP-L4, Product A
Measurabl
e
Particle
Size
(um)
Sample
flow rate
(mL/min)
KL-30A
0.05 - 0.2
XP-L4
Product A
MODEL
Counting
efficiency
(％)
Actual
sample flow rate
(mL/min)
Maximum
particle
Concentration
(counts/mL
0.1- 0.2
@10% loss)
um
0.05
um
0.10.2
um
0.05
um
20
(5)
10
(1)
2
15,000
0.05 - 0.2
10
(0.5)
1
(0.05)
0.1
200,000
0.05 - 0.2
1000
0.375
3.75
10,000
Product A Counting efficiency & Actual sample flow rate
depend on particle size
7/16/2015
RION CO.,LTD
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The weak point of Partial detection type LPC
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Particle counter sensitivity differs when measuring same quality &
same size particle
→(EX) Error count of 0.2um particle as 0.05um or 0.1um
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Counting efficiency（Actual flow rate）depends on particle size
→Large particle is measured as “catalog spec” or better,
Small partcle is measured smaller than actual count
RION KL-30A & XP-L4 are improved the
weak point of partial detection type LPC
7/16/2015
RION CO.,LTD
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Particle counter detection method(1)
Laser Beam
Flow-Cell
(a)
Cross-sectional view
vertical to irradiating light
(b)
Cross-sectional view
vertical to sample flow
Sample Flow
Laser Beam
Flow-Cell
Intensity Distribution
of Laser Beam
High Detection Method
7/16/2015
Partial Detection Method
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Particle counter detection method(2)
Scattered light
( from fringe of the flow cell)
Photo Diode
Aperture
Scattered light
(from center of flow cell)
Lenses
Flow Cell
Conventional Optical System
Laser Beam
(Vertical to paper)
Scattered light
( from fringe of the flow cell)
a
b
c
3ch Photo Diode
L Shape Flow Cell
Lenses
KL-30A Optical System
7/16/2015
RION CO.,LTD
Scattered light
(from center of flow cell).
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Actual flow rate comparison KL-30A, Product A
Actual sample flow rate (mL/min)
Product A .3.75mL/min
Actual sample flow rate is
less dependent on measured
particle diameter
KL-30A
Product A
0.05
7/16/2015
Actual sample flow rate is
dependent on measured
particle diameter
0.1
Diameter of PSL (um)
RION CO.,LTD
0.2
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PSL comparison test KL-30A, KS-42A, Product A
PSL 0.055μｍ
PSL 0.152μｍ
4000
Particle concentration（ps/mL）
Particle concentration(ps/mL）
5000
KL-30A
4000
Product A
3000
2000
KL-30A
KL-42A
3000
Product A
2000
1000
1000
0
0
0.01
7/16/2015
0.1
Praticle size（μｍ）
1
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0.01
0.1
Particle size（μｍ）
1
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KS-18F & KE-40B1 for Chemicals(HF)
0.05um、1mL/min
7/16/2015
RION CO.,LTD
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KS-18F Features
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Minimum detectable particle size 0.05um
Counting efficiency
10 times larger than KS-17AF and KS-17A
Actual flow rate
Less dependent on measured particle size
Flow cell Sapphire
Controller KE-40B1 Built-in thermal printer
7/16/2015
RION CO.,LTD
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Specifications KS-18F, KS-17AF, Product B
Measurabl
e
Particle
Size
(um)
Sample
flow rate
(mL/min)
KS-18F
0.05 - 0.2
KS-17AF
Product B
MODEL
Counting
efficiency
(％)
Effective
sample flow rate
(mL/min)
Maximum
particle
Concentration
(counts/mL
0.05
um
0.1- 0.2
um
0.05
um
0.1- 0.2
um
10
(5)
10
(0.5)
1
10,000
0.06 - 0.2
10
(0.5)
1
(0.05)
0.1
200,000
0.065 - 0.2
100
0.6
0.6
@10% loss)
10,000
Product B Counting efficiency & Effective sample flow rate
depend on particle size
7/16/2015
RION CO.,LTD
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