Transcript Slide 1

Scanning (and Transmission)
Electron Microscopies
Andrew van Bommel
February 21st, 2006
SEM
Electron Source (GUN)
• The majority use a thermionic gun:
– A voltage is applied to a tungsten filament
(cathode): it is heated and e-s are produced
– The electrons are accelerated to the anode
– Electrons can exit a small (<1mm) hole to move
down the EM column (in a vacuum) for imaging
Electron Source
• The thermionic gun ensures that:
– All electrons are emitted from a point source (since
they are accumulated in a space charge before they
leave the anode)
– The electrons have similar energies
– Only electrons parallel to the optical axis can exit
the gun
Field-Emission Gun (FESEM)
• Does not heat a filament- also called a cold
cathode field emitter
• The cathode (W) is placed in a electrical
potential gradient
• Cathode: a tungsten wire fashioned into a
sharp point (radius of less than 100 nm)
• Can produce electron beam of 2 nm:
theoretically resolution limit (3-6X SEM)
Electron Beam
• Stream of electrons are ‘focused’ by a series of
metal apertures and magnetic lenses
• The magnetic lenses are circular
electromagnets with the ability to project a
precise circular magnetic field in a particular
region (they ‘steer’ the electron beam)
• Magnetic lenses are similar to optical lenses:
– Focal length, angle of divergence
– Spherical aberration, Chromatic aberration
Sample Preparation
• Non-conductive materials must be coated in
gold so that they conduct (and therefore
interact with) the beam of electrons
Specimen Interaction
• In SEM:
– Backscatter: electrons are reflected by atoms
– Secondary electrons: from material
Backscattered Electrons
• AKA elastic scattering: little change in energy
of scattered electrons
• Backscatter arises from interaction of electrons
with nucleus: atoms with higher mass scatter
Cu
more
• Can get contrasts:
Al
Secondary Electrons
• Electrons emitted from the specimen with <
50eV (only small amt of energy transferred)
• Electrons produced by interactions with
energetic electron beam and weakly bonded
electrons (metals, insulators, semiconductors)
• Detection :
– Electrons  Scintillator  photons 
photomultiplier  conversion into electric current
 detection
– Process in order to pass through vacuum env.
Scanning (in SEM and STEM)
• A set of coils scans or sweeps the electron
beam (like a television)
• The instrument counts the interactions of the
electron beam at a certain location (the more
reactions, the brighter the pixel)
• The pattern can be scanned 30 times per sec.
Specimen Interaction
• In TEM:
– Elastically and inelastically scattered electrons
TEM Electron Scattering
• The brightness of the image is proportional to
the amount of unscattered electrons
• Atoms of small mass will leave more electrons
unscattered, so they will appear brighter in the
micrograph
Display
• SEM: the interactions are displayed on a CRT
screen
• TEM: the transmitted electrons (after
interacting with the sample) strike a phosphor
image screen with the brightness of the image
dependant on the number of electrons hitting
the screen
Analytical Techniques
• EDX: Energy Dispersive X-Ray Analysis- find
info on elementary composition from
characteristic X-rays given off by sample
(good for elements with high z)
• EELS: Electron Energy Loss Spectroscopyuses the characteristic energy loss of
transmitted electrons to find info on elements
(composition, bonding, electronic structure)
(good for elements with low z)
Nano Applications
• Nanomeasurements in TEM (Microsc. and
Microanal., 6 (2000) 224-230)
• Bending modulus of a single carbon nanotube
has been measured
Nano Applications
• A method for characterizing carbon nanotubes
(J. Electron Microsc. 50 (2001) 321-324)
• Heated C NTs to 600°C removed
contamination and stabilized the structure
Nano Applications
• Three-dimensional STEM for observing
nanostructures (J. Electron Microsc. 50 (2001)
235-241)
• Specimen stage rotated, e-s from all directions
Nanomaterials
• See Microscopy Research and Technique,
Nanomaterials Characterization Using
Microscopy Vol. 64, Issue 4-5
• Other Jounals:
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Journal of Electron Microscopy
Microscopy and Microanalysis
Electron Microscopy Reviews
Journal of Microscopy