Transcript Easy Cluster

EasyCluster™ 3.0
Product and Technology Summary
Easy, Fast and Reliable Equipment Control Solution
EasyCluster 3.0
What is EasyCluster ?
HOST
 EasyCluster is a framework used to build
control systems for various types of
equipment - cluster,track and standalone
tools - easily, quickly and economically.
 EasyCluster is composed of EasyCTC,
EasyTMC, EasyPMC and EasyGEM which
can be flexibly combined according to
target
equipment.
FAB Network
CTC
PMC
PMC
I/F
PMC
PMC
 EasyCluster can be used for development of
new equipment and retrofit of used
equipment.
EasyCluster 3.0
TMC
Intra-tool
Network
Machine
Advantages
 Easy and cheap to assemble control system hardware
: User selectable general H/W and S/W, No 3rd party S/W license
 Easy to get skilled engineers
: Use of popular S/W tool (C/C++)
 Easy to develop applications in a short time
: Easily configured engines, abundant application examples, multiple vendor
device drivers
 Easy to maintain and re-use
: Object-oriented component-based S/W
 Easy to distribute/combine hardware
: Modular S/W structure
 Easy to operate
: Well-organized GUI following SEMI E95/Sematech Guidelines
EasyCluster 3.0
S/W Product History
Techware
Brooks
SEMI/MESC
ClusterLink
ClusterLink3
CV Java
PRI
RPI
RPCluster
EquipeSoft
ClusterPro
merged
Kornic
DOS
NT
RPCore
ControlPro
EasyCluster
EasyCluster2.0
TI
ControlWorks
EasyCluster 3.0
ACT
ControlWorks
System Requirements - H/W
 CTC (User selectable)





Pentium III or Higher, min. 128 MB RAM
Monitor : SVGA (1,024 768)
CD ROM Driver
Input Device : Touchscreen, Mouse, Light pen
LAN Card
 TMC/PMCs (User selectable)
 Pentium III or higher, min. 64 MB RAM
 Monitor : SVGA (can be shared with other module controllers)
 CDROM Driver
 Real time embedded controller (Plug in board for real time control)
 DSP CPU(TMS320C32), 12 ch. A/I, 12 ch. A/O
 Communication with PMC via DPRAM
EasyCluster 3.0
System Requirements - S/W
 Operating System
 Windows NT4.0 Workstation, Windows 2000, Windows XP
 Supported Language : English, Japanese, Korean
 S/W Development Tools
 Visual C/C++ 6.0+ (Microsoft)
 Paintbrush or Adobe Photoshop
 EasyCTC, EasyTMC, EasyPMC, EasyGEM (Kornic)
CTC Application
EasyCTC
EasyGEM
Windows NT
TMC Application
EasyTMC
Windows NT
PMC
Application
CTC
CTCApplication
Application
EasyPMC
EasyTMC
EasyTMC
Windows
NT
Windows
WindowsNT
NT
Ethernet
EasyCluster 3.0
Software architecture
(CTC - Module Controller Interface)
TCP/IP
Module Controller
CTC
User
Main GUI
• Screen Handling
• I/O Handling
• Recipe Editor
• Scheduler
• Datalog Management
Local GUI
Full Duplex
I/O Controller
I/O Manager
Sequence
Code for
Event
• I/O Manager (Server)
Command
• Event Manager
Response
Recipe Analyzer
• Alarm Manager
Post
Recovery
EasyCluster 3.0
User
Alarm Handler
Real
Equipment
Software Architecture
(within Module Controller)
Local Graphic User Interface
CTC
Remote
Interface
Module
Driver
Module
Driver
Module
Robot
Cassette
I/O Manager
Digital I/O
Analog I/O
Driver
Interlocks
Alarm Handler
Real Equipment
Sequence Manager
User Written #1
Application Code
User Written #2
EasyCluster 3.0
Software Architecture
EasyCluster 3.0
System Example 1
CTC
FEATURES
• Standard Implementation
PMC
• S/W and H/W are both
distributed.
PMC
• Good for multi-PM cluster
tools with complicated TM
PMC
PMC
• Each module can have
local graphic user interface.
TMC
Intra-tool Network
Machine
EasyCluster 3.0
System Example 2
FEATURES
Intra-tool Network
• Economical implementation
PMC
• CTC/TMC share H/W, PM’s
are distributed.
PMC
• Good for cluster or batch
tools with simple transport
requirements.
CTC/TMC
• Each module can have local
graphic user interface.
Machine
EasyCluster 3.0
System Example 3
FEATURES
• Very cheap implementation
•All Control S/W on single PC
CTC/TMC/PMC
• Good for simple standalone type
systems, proof of concept/pilot
tools with minimal cycling
Machine
EasyCluster 3.0
CTC
 Framework for CTC Software








System Definition through text configuration files
Dynamic Scheduler
Recipe Management
Graphic User Interface
Alarm Handling
Datalogging (Event, Alarm, Data) & Plotting
Access Control
Factory Communication
EasyCluster 3.0
System Definition
 Object Oriented Style System Definition
 Support For:
 Wafer Transfer Systems
 AFE: EFEMs,FOUPs, Atmospheric Robots, Aligners
 Vacuum Platforms : LoadLocks, Coolers, Vacuum Robots
(Multiple configurations)
 I/O: Serial, Devicenet, TCP/IP
 Process Modules
 Up to 32 Process Modules
 Cooler
EasyCluster 3.0
Dynamic Scheduler
Supports Dual Arm & Dual Finger Robot
Finds Optimal Path for Robot Motion
Sets Priority for Wafer Exchange (Pick & Place)
Supports Active & Passive Wafer Handoff
Supports Serial & Parallel Chamber Processing
Hierarchical Recipe Structure (Lot/Cluster/Process)
Dual Lot Processing
Residence Control
Supports up to 32 Process Modules and 3 Transport
Modules
EasyCluster 3.0
Recipe Management
 Recipe Editor
 Text Based Recipe Editor Setup
 Look and Feel can be customised
 Parameter / Single Recipe / Multi Step Recipe Engine
 Display of several steps at Same Screen
 Step Operation & File Handling Support
( New / Load / Save(as) / Cancel / Delete )
EasyCluster 3.0
Recipe Hierarchy
PathPM1
Wafer1
2
3
4
5
6
7
8
9
PathPM1
PM2
PathPM1
PM2
PM3
…
25
LOT RECIPE
EasyCluster 3.0
CLUSTER RECIPE
PM1 Process Recipe 1
PM1 Process Recipe 2
PM1 Process Recipe 3
PM1 Process Recipe 4
PM2 Process Recipe 1
PM2 Process Recipe 2
PM2 Process Recipe 3
PM2 Process Recipe 4
PM3 Process Recipe 1
PM3 Process Recipe 2
PM3 Process Recipe 3
PM3 Process Recipe 4
PROCESS RECIPE
Graphical User Interface










GUI Interface by GUI Definition Files
Completely customizable
Object Oriented Symbols
Includes Standard Background (DLL)
Includes Standard Image Library (DLL)
User can edit/add libraries using VC++
Font Property Definition (Text)
Palette Property Definition(Text)
Text Property Definition (Text)
Page Setup (Text)
EasyCluster 3.0
Alarm Handling





Subsystems post alarm when exception occurs (Local/Remote)
Alarm manager displays alarm details and recovery actions
Operator selects recovery action, Auto-recovery action executed.
Alarm is cleared if successful recovery
Alarm and recovery status is logged
TMC,
PMCs
Alarm Post
Log
CTC
Alarm Manager
Alarm Clear
Action 2
Call
Display
Select
Alarm Message,
Recovery Actions
EasyCluster 3.0
Action 1
Action 3
…
Data Logging and Plotting








Includes Data logging Engine ( Lot / Process / History / Alarm )
User can add or delete items to be logged
Plotting Engine for current and historical trend
Minimum logging interval : 0.5 sec
Number of items to be logged : Max. 128
Number of items to be plotted at same screen : Max. 8
Datalogging by CTC and PMC
Able to view logs by wafer, PM, Lot or Job
EasyCluster 3.0
Access Control
 User Account Management
 User ID
 Password
 User Level
 Access Limitation according to User level
 Activate/Deactivate Buttons
EasyCluster 3.0
FAB Automation
 SEMI Communication Supported
• SECS I(RS232C) / HSMS-SS (Ethernet)
• SECS II
• GEM : All streams and functions (Standard & Custom)
• 300mm FA Supported : OSS(Object Service Standards), RMS(Recipe
Management Service), PJM(Process Job Management), CJM(Control Job
Management), STS(Substrate Service), CMS(Carrier Management )
 FA pre-test Tool
• SECSim Pro™ (GW Associates)
HOST
CTC
LAN
SECSim Pro
EasyCluster 3.0
EasyCluster
TMC/PMC
 Framework for TMC/PMC S/W Development
•
•
•
•
Integration with CTC
IO Configuration
Function Management
Interlocks (Setpoint, Value)
EasyCluster 3.0
Integration with CTC
 Direct & Automatic Alarm Integration
 IO Integration
 Function Integration
CTC Send
Event + Data
CTC
Translate
Event & Data
Local Module
Function
Module Controller
 Message Binding
CTC Sends
Message
CTC
EasyCluster 3.0
Local
User Written Code
Module Controller
I/O Configuration
 Text-based I/O channel definition
 I/O channels
 Digital (Real/Virtual)
 Analog (Real/Virtual), (Linear/Lookup Table)
 String
 I/O Devices





Direct I/O Boards (A/I, A/O, D/I, D/O)
Serial I/O Board
DeviceNet/Profibus
Special Devices with Win32 Drivers
Ethernet
EasyCluster 3.0
Function Management
 Unit level functions coded in C
- Example : Robot_Fcn(Motion, Stn, Slot)
 Distributed Architecture with higher level functions calling lower level
functions
- Example : Move_Wfr(Srce, Slot, Dstn, Slot) {
Slot_Vlv(CM, Open)
Robot_Fcn(Pick, CM, 1)
Slot_Vlv(PM1, Open)
Robot_Fcn(Place, PM1, 1)
…. }
 Parameters are given to the called function as a message
 All functions registered in the Function Definition File
 Individual function management (kill, compile, reload), able to upgrade
portions of the application without shutting down.
EasyCluster 3.0
Interlocks
 Setpoint Interlocks
• Before output action, several input values must be checked.
• Example
action( VAT_Valve == Close ) {
condition( Robot_Arm == Retracted ) $alarm = 115;
}
 Value Interlock
• If certain input meet a certain condition, several output channel must be
set to pre-defined value immediately.
• Example
if ( Pump_Status == Error ) {
Forln_Vlv = Close;
$alarm = 105;
}
EasyCluster 3.0
Real-time Controller
 Available Kornic I/O board for Real Time Control
 Temperature Control for RTP, Furnace, etc (SISO, MIMO)
 Precise valve timing Control for ALD
 End Point Detection for Etching
 Embedded Controller Spec.
 CPU : DSP (TMS320C32, 50MHz)
 I/F with PMC : DPRAM or RS232C
 I/O :
• A/I : 14-bit resolution, 12 ch.
• A/O : 12-bit resolution. 12 ch.
• DIO : 24 ch.
EasyCluster 3.0
Remote Monitoring
HOST
Office
System Monitoring
HSMS/SECS/GEM
• using HSMS/SECS
(Fab Network)
• or EasyCluster, Faster
(Optional Network)
• Diagnosis
• Paging Service
CTC
PMC
PMC
I/F
PMC
PMC
TMC
Intra-tool
Network
TCP/IP
EasyCluster 3.0
Machine
Application Example (300mm Asher)
System Spec.
• 300mm Asher
• Two batch Processing chambers
• Dual-arm, Dual-pan Robot
• Two FOUP Openers
• Dual-arm ATM Robot
• Cooling and Pre-heating Buffer
Stations
EasyCluster 3.0
Application Example (200mm Track)
System Spec.
• 200mm Track
• 5 Process Modules
• Two Robots
• Four Cassette Stages
• One Buffer Station
EasyCluster 3.0
Application Example (200mm Track)
System Spec.
• 200mm Track
• 16 Process Modules
• Four Robots
• Four Cassette Stages
• Three Buffer Station
EasyCluster 3.0
Application Example (200mm ALD)
System Spec.
• 200mm ALD Cluster Tool
• 2 Batch Process Modules
• Brooks MX-700 Platform
EasyCluster 3.0
Application Example (300mm CVD)
System Spec.
• 300mm UHVCVD Cluster Tool
• 3 Process Modules
• Brooks GX-6000 Platform
EasyCluster 3.0
Application Example (200mm CVD)
System Spec.
• 200mm HDPCVD Cluster Tool
• 2 Process Modules
• Brooks IX Series Platform
EasyCluster 3.0
Application Example (300mm CVD)
System Spec.
• 300mm PECVD Cluster Tool
• 4 Process Modules
• 3 FOUP Loadports
• 6-sided Vacuum Platform
EasyCluster 3.0
Application Example (200mm Sputter)
System Spec.
• 200mm Sputtering Cluster Tool
• 6 Process Modules
- 5 Sputter Modules
- 1 Etching Module
• Brooks MX-800 Platform
EasyCluster 3.0
Customers
Equipment
Customer
200mm
XXXXXXXX
Q’ty
Installed Place
Asher
12
Samsung, TSMC
30
Dongbu
6
Samsung
XXXXXXXX
Track
XXXXXXX
PECVD
XXXXXXXX
ALD
3
Hynix, ETRI
XXXXXXXX
ALD
1
Hynix
PECVD
XXXXXXXX
Asher
1
XXXXXXXX
Asher
1
XXXXXXXX
UHVCVD
2
PSC
DNP
XXXXXXXX
ALD, Mask Etcher
1
XXXXXXXX
Sputter
1
XXXXXXXX
HDPCVD
1
XXXXXXXX
Laser Cleaning
1
XXXXXXXX
Etcher, CVD
3
EasyCluster 3.0
Remark
300mm
Japan
Taiwan
ROHM
KEC
Japan
EasyCluster Products
EasyCTC
EasyTMC
EasyPMC
EasyGEM
Development License
All development environments, manual, templates
Runtime License
Lock keys configured to the equipment
Controller H/W
CTC/TMC/PMCs configured to Equipment
Training
Engineering Service
EasyCluster 3.0
4 weeks
2 weeks
Depends on the requirements and the complexity of the
machine
EasyCluster Users’ Requirements
Other S/W Experience
MS Visual C API Level
Most Important
EasyCluster 3.0
C Programming Experience & Skill
Full Understanding of Equipment Details