Transcript MEMS in Space - Yola

MEMS in Space
Jan H. Hales
[email protected]
MIC – Department of Micro and Nanotechnology
Technical University of Denmark, DTU
Space Technology Education Conference 2005
Session 7: “ACDS and Orbit Control 2”
STEC2005 – Jan H. Hales – 8th of April 2005
Micro Electro Mechanical System
MEMS
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Integration of devices on micrometer scale
based on IC batch processing
STEC2005 – Jan H. Hales – 8th of April 2005
Space Relevance
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Enhanced device performance by downscaling
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Low mass and power consumption
Robustness and redundancy
Batch production – reducing device cost
STEC2005 – Jan H. Hales – 8th of April 2005
Space Applications
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Sensors/detectors
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Actuators
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Thrusters/micro valves
Reaction wheels
Magnetotorquers
Micro valves
Communication devices
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Sun sensor
Magnetometer
Particle/radiation detector
Optical
RF
Other
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Thermal control
Lab-on-a-Chip
STEC2005 – Jan H. Hales – 8th of April 2005
Projects at MIC
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Sun Sensor
Electron Emitter
Ion Thruster
Nano Environment Monitoring Unit
(NEMU)
STEC2005 – Jan H. Hales – 8th of April 2005
Sun Sensor
a
i
b
c
 i O
l
2e
Pyrex
Si
SiO2
Cr/Au
Sensor area
 Two-Axis Triagular Slit Sensor
 FOV ±70° (>55°),
resolution<0.1°
 PCB size: 39mm  50mm
 Sub System Mass: 7.1g
 Power act./standby: 10mA/65µA
STEC2005 – Jan H. Hales – 8th of April 2005
Sun Sensor on SSETI
STEC2005 – Jan H. Hales – 8th of April 2005
Electron Emitter
Electrons
E-field
Gate
Oxide layer
Silicon with spikes
STEC2005 – Jan H. Hales – 8th of April 2005
Electric Propulsion
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Electro thermal
Electromagnetic
Electrostatic
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Field Emission Electric
Propulsion (FEEP)
STEC2005 – Jan H. Hales – 8th of April 2005
Ion Thruster - FEEP
Rh
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de
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Ga/In
2rc
Design Goals
Va
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100 times better than
comparable thrusters
1cm2 chip producing 1mN
of thrust with a resolution
of 3.9µN
Integrated neutralizer
Applications
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Charge control
Station keeping
Fine pointing - formation
flying
Main propulsion system
STEC2005 – Jan H. Hales – 8th of April 2005
Ion Thruster - FEEP
200µm
200µm
8µm
STEC2005 – Jan H. Hales – 8th of April 2005
Outlook
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Obtain a larger student involvement
Better packaged sun sensor
Fabrication of final batch of e-emitters
Optimised version of Ion thruster
Initiation of the NEMU project
STEC2005 – Jan H. Hales – 8th of April 2005
MEMS in Space
Thank you for your attention
Any questions?
STEC2005 – Jan H. Hales – 8th of April 2005