Transcript EX5 PowerPoint Pr

The EX5 Excimer Laser
A total metal ceramic excimer
laser with many advantages
• Low cost Mini laser
• Long gas lifetime
• Low cost of operation
• Computer controlled
• Air cooled
• High power in a compact table
top package
GAM LASER, INC. 2009
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TYPE II SUPERCHAMBER
Performance Highlights
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Total Metal/ceramic design
Corona preionization
New chamber material
New direct drive blower
New electrode design
Active optics filtering for longer optics lifetime
Improved optics material
Increased bearing lifetime
Increased gas lifetime
Linear power with repetition rate
Higher repetition rate
1% pulse to pulse stability
Reduced parts count gas handling system
Solid state thyratron
GAM LASER, INC. 2009
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EX5-F2 157nm PERFORMANCE
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Vacuum Ultraviolet at 157nm
Single Fill gas lifetime
Static gas lifetime
Energy
Average power
Stability
KF/16 purge flange included
GAM LASER, INC. 2009
10 million pulses
10 Days
2mJ
.65 W
<2% RMS
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EX5 Specifications
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
1.5/2
12
20
8
6
Peak Power kW
250
1500
2500
1000
750
Average Power @ 250Hz
0.4
2.4
4.0
1.4
1.3
Average Power @ 500Hz
0.65
4.0
8.0
2.5
2.4
20E6
15E6
Repetition Rate Max. Hz2
Dynamic gas lifetime Pulses to 50% energy
Shelf life to 50% energy
250/500/750
10E6
12E6
18E6
10 days
20 days
30 days
Pulse Length nS
>3 Months
30 Days
8
Stability
<3% Standard Deviation
Tube Service
2 Billion Pulses
Beam Size, mm
3X 6
Divergence, mRad full angle
1X2
Cooling
AIR
Timing Jitter
2nS Standard Deviation
Weight
15kg
GAM LASER, INC. 2009
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Dynamic Gas Lifetime
25
12.5
20
10
15
7.5
10
5
5
2.5
0
0
0
2.25
4.5
6.75
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11.25 13.5 15.75
Power W
Energy mJ
EX5/500 Dynamic gas lifetime @248nm
18
MegaPulses
GAM LASER, INC. 2009
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Repetition Rate Performance
Power W
EX5/500 Average power Vs Repetition rate
10
9
8
7
6
5
4
3
2
1
0
0
50
100
150
200
250
300
350
400
450
500
Repetition rate Hz
ArF 193nm
GAM LASER, INC. 2009
KrF 248nm
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Pulse to Pulse Stability
0.77% rms Stability @ 200Hz, 13.5mJ KrF 248nm
GAM LASER, INC. 2009
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EX5 Running Costs
Running costs for 2 billion pulses
ArF
KrF
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Refurbishment after 2 billion pulses $7500
Premix gas cylinders
$1500
Optics exchanges
$7000
$7500
$1200
$1150
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Total costs
$9850
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$16000
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Cost per Thousand pulses
$0.008
Running cost per hour at 200Hz $5.76
$0.0049
$3.53
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Cost per pulse
0.49e-5 ¢
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0.8e-5 ¢
GAM LASER, INC. 2009
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ORLANDO, FLORIDA
GAM LASER, INC. 2009
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